J. Bartha
发表
U. Rau,
T. Zimmermann,
A. Flikweert,
2014
.
T. Zimmermann,
A. Flikweert,
T. Merdzhanova,
2012
.
Johann W. Bartha,
C. Strobel,
J. Kuske,
2009
.
Christian G. Schroer,
Karola Richter,
Johann W. Bartha,
2014
.
C. Hohle,
Katja Keil,
Johannes Kretz,
2009
.
C. Wenger,
K. Richter,
J. Bartha,
2019,
Journal of Applied Physics.
N. Neumann,
D. Plettemeier,
László Szilágyi,
2020,
Journal of Lightwave Technology.
G. Rubloff,
P. Ho,
B. Silverman,
1985
.
T. Mikolajick,
U. Schroeder,
K. Leo,
2016
.
T. Mikolajick,
U. Schroeder,
K. Leo,
2015,
ACS applied materials & interfaces.
T. Henke,
J. Bartha,
M. Albert,
2017
.
T. Henke,
J. Bartha,
M. Albert,
2015
.
Johann W. Bartha,
Roland Rzehak,
Sascha Bott,
2013
.
P. Kücher,
J. Bartha,
R. Rzehak,
2011,
IEEE Transactions on Semiconductor Manufacturing.
P. Ho,
P. Hahn,
J. Bartha,
1985
.
Ye. A. Cherebilo,
C. Wenzel,
J. Bartha,
2009
.
T. Mikolajick,
J. Bartha,
M. Albert,
2022,
Journal of Vacuum Science & Technology A.
Ye. A. Cherebilo,
C. Wenzel,
J. Bartha,
2009
.
Hartmut Ruelke,
Ulrich Mayer,
Johann W. Bartha,
2015
.
J. Bartha,
H. Ruelke,
U. Mayer,
2015
.
H. Engelmann,
R. Hübner,
J. Bartha,
2013
.
C. Wenger,
J. Bartha,
M. Albert,
2002
.
B. Hintze,
J. Bartha,
M. Albert,
2010
.
W. F. V. Dorp,
E. Zschech,
J. Bartha,
2017,
Nanotechnology.
J. Bartha,
M. Henzler,
U. Barjenbruch,
1986
.
C. Wenzel,
S. Strehle,
R. Kaltofen,
2012
.
C. Wenzel,
A. Jahn,
F. Munnik,
2011
.
B. Hintze,
S. Menzel,
L. Wilde,
2009
.
C. Wenzel,
E. Filippova,
J. Bartha,
2003
.
C. Wenzel,
E. Filippova,
J. Bartha,
2001
.
J. L. Jordan,
P. Ho,
J. Clabes,
1986
.
J. Bartha,
H. Barthel,
K. Estel,
2010
.
Ye. A. Cherebilo,
C. Wenzel,
J. Bartha,
2011
.
F. Stahr,
J. Bartha,
C. Strobel,
2022,
Thin Solid Films.
J. Bartha,
M. Albert,
M. Knaut,
2019,
Microelectronic Engineering.
J. Bartha,
M. Albert,
M. Knaut,
2011,
2011 Semiconductor Conference Dresden.
T. Mikolajick,
J. Bartha,
M. Knaut,
2016,
IEEE Journal of Photovoltaics.
C. Wenger,
J. Bartha,
C. Strobel,
2017
.
T. Henke,
J. Bartha,
M. Albert,
2013
.
K. Eichhorn,
J. Bartha,
B. Vasilev,
2010,
Applied spectroscopy.
J. Bartha,
U. Kuenzelmann,
H. Schumacher,
2010
.
Shabnam Mohammadi Naghadeh,
R. Weigel,
S. Mannsfeld,
2017
.
S. Strehle,
J. Bartha,
M. Albert,
2008
.
J. Bartha,
C. Kubasch,
2012
.
J. Bartha,
C. Kubasch,
2011,
2011 IEEE International Interconnect Technology Conference.
Klaus Wetzig,
Ehrenfried Zschech,
Johann W. Bartha,
2003
.
S. Menzel,
H. Schmidt,
M. Weihnacht,
2004
.
C. Wenzel,
J. Bartha,
O. Khramova,
2005
.
J. Bartha,
K. Richter,
C. Kubasch,
2007
.
J. Bartha,
C. Strobel,
F. Winkler,
2020,
Small.
J. Bartha,
M. Oettel,
Timo Schössler,
2017
.
C. Detavernier,
F. Lazzarino,
J. Bartha,
2015
.
J. Bartha,
M. Albert,
M. Knaut,
2020,
Journal of Vacuum Science & Technology A.
Hartmut Ruelke,
Ulrich Mayer,
J. Bartha,
2010,
IEEE Transactions on Electron Devices.
C. Wenzel,
R. Hübner,
Zaoli Zhang,
2006
.
C. Wenzel,
J. Bartha,
A. Mücklich,
2002
.
S. Strehle,
J. Bartha,
M. Albert,
2011
.
S. Strehle,
J. Bartha,
M. Albert,
2008
.
J. Bartha,
M. Albert,
A. Kosarev,
2003
.
T. Mikolajick,
J. Bartha,
M. Knaut,
2018,
2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC).
C. Wenger,
J. Bartha,
C. Strobel,
2016,
1605.05099.
J. Bartha,
J. Kuske,
C. Strobel,
2015
.
T. Mikolajick,
T. Henke,
F. Fengler,
2015
.
J. Bartha,
M. Albert,
A. Kottwitz,
2002
.
C. Wenzel,
J. Bartha,
M. Albert,
2019,
Microelectronic Engineering.
P. Kücher,
M. Trentzsch,
T. Herrmann,
2009
.
J. Bartha,
M. Oettel,
Timo Schössler,
2017
.
J. Bartha,
R. Rzehak,
B. Vasilev,
2013
.
T. Mikolajick,
A. Jahn,
J. Bartha,
2022,
ACS applied materials & interfaces.
J. Bartha,
R. Liske,
A. Preusse,
2009
.
Uwe Schroeder,
Johann W. Bartha,
G. Dollinger,
2003
.
Harald Seidl,
Uwe Schroeder,
Johann W. Bartha,
2003
.
G. Rubloff,
P. Ho,
P. Hahn,
1984
.
J. Bartha,
M. Rose,
2009
.
Johann W. Bartha,
Matthias Albert,
B. Hintze,
2007
.
S. Strehle,
J. Bartha,
K. Wetzig,
2009
.
J. Bartha,
M. Henzler,
1985
.
S. Menzel,
S. Strehle,
A. Jahn,
2009
.
S. Menzel,
S. Strehle,
J. Bartha,
2011
.
T. Mikolajick,
J. Bartha,
M. Knaut,
2014
.
J. Macák,
J. Přikryl,
L. Hromádko,
2016,
Langmuir : the ACS journal of surfaces and colloids.
Christian Wenzel,
Christian G. Schroer,
Karola Richter,
2017
.
J. Clabes,
B. Silverman,
J. Bartha,
1986
.
J. Bartha,
D. Lehninger,
H. Wojcik,
2011,
2011 Semiconductor Conference Dresden.
Hans Kleemann,
Karl Leo,
Björn Lüssem,
2013,
Nature Communications.
Juergen Thomas,
H. Schmidt,
J. Bartha,
2007
.
Christian Wenzel,
Oleg Alexeyevic Novodvorsky,
Rafael Ya. Sagdeev,
2002,
International Conference on Laser and Laser Information Technologies.
Johann W. Bartha,
J. Bartha,
C. Kubasch,
2013
.
T. Zimmermann,
A. Flikweert,
A. Gordijn,
2010
.
Johann W. Bartha,
Marcel Junige,
Matthias Albert,
2011,
2011 Semiconductor Conference Dresden.
J. Bartha,
H. H. Wagner,
G. Elsner,
1990
.
J. Bartha,
M. Albert,
Marion Geidel,
2013
.
Johann W. Bartha,
Marcel Junige,
Matthias Albert,
2012
.
J. Bartha,
K. Richter,
F. Winkler,
2018,
IEEE Electron Device Letters.
J. W. Bartha,
A. C. Tam,
A. Tam,
1999
.
Oleg Alexeyevic Novodvorsky,
Olga D. Khramova,
Elena O. Filippova,
2003,
Other Conferences.
T. Mikolajick,
U. Schroeder,
P. Schmidt,
2015
.
J. Bartha,
S. Killge,
V. Neumann,
2016
.
K. Leo,
J. Bartha,
M. Sawatzki,
2015
.
S. Menzel,
S. Strehle,
J. Bartha,
2010
.
T. Henke,
J. Bartha,
M. Albert,
2017
.
C. Wenzel,
F. Lebedev,
J. Bartha,
2013
.
Christian Wenger,
Mirko Fraschke,
Johann W. Bartha,
2015
.
C. Wenger,
A. Di Bartolomeo,
J. Bartha,
2018,
Materials.
Johann W. Bartha,
J. Greschner,
J. Bartha,
1995
.
R. Hübner,
T. Henke,
J. Bartha,
2014
.
J. W. Bartha,
U. Mayer,
H. Ruelke,
2011,
IEEE Transactions on Electron Devices.
S. Jakschik,
A. Avellan,
U. Schroeder,
2004,
IEEE Transactions on Electron Devices.
Johann W. Bartha,
J. Bartha,
I. Endler,
2010
.
S Bott,
R Rzehak,
B Vasilev,
2011,
IEEE Transactions on Semiconductor Manufacturing.
Johann W. Bartha,
Mikko Ritala,
M. Ritala,
2010,
ACS applied materials & interfaces.
Karl Leo,
Thomas Mikolajick,
Uwe Schroeder,
2015
.
Christian Wenger,
Grzegorz Lupina,
Johann W. Bartha,
2015,
Microtechnologies for the New Millennium.
Hartmut Ruelke,
Ulrich Mayer,
Johann W. Bartha,
2010
.
J. Bartha,
M. Albert,
J. Gluch,
2010
.
A comparative study of thermal and plasma enhanced ALD Ta-N-C films on SiO2, SiCOH and Cu substrates
J. Bartha,
M. Albert,
H. Wojcik,
2007,
2007 IEEE International Interconnect Technology Conferencee.
J. Bartha,
M. Albert,
M. Knaut,
2020
.
J. Bartha,
M. Albert,
R. Terasa,
2005
.
Katja Keil,
Marc Hauptmann,
Kang-Hoon Choi,
2009
.
J. Macák,
J. Přikryl,
J. Bartha,
2016,
Langmuir : the ACS journal of surfaces and colloids.
Johann W. Bartha,
Lutz Wilde,
Paweł Piotr Michałowski,
2009
.
Ronny Henker,
Frank Ellinger,
Dirk Plettemeier,
2017,
Other Conferences.
Frank Ellinger,
Zhipeng Zhang,
Robert Weigel,
2017,
2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems (COMCAS).
T. Mikolajick,
U. Schroeder,
K. Leo,
2015,
ACS applied materials & interfaces.
J. Bartha,
S. Killge,
V. Neumann,
2019
.