M. Katagiri

发表

D. Nishide, B. Ito, M. Wada, 2014, Proceedings of International Conference on Planarization/CMP Technology 2014.

M. Katagiri, S. Koizumi, J. Pernot, 2006 .

Norikazu Mizuochi, Takahide Umeda, S. Hagiwara, 2006 .

T. Umeda, A. Henry, E. Janzén, 2006 .

T. Ishikura, D. Nishide, M. Wada, 2014, 2014 IEEE International Reliability Physics Symposium.