J. Opsal

发表

Thermal-wave detection and thin-film thickness measurements with laser beam deflection.

A. Rosencwaig, J. Opsal, D. Willenborg, 1983, Applied optics.

Detection of thermal waves through optical reflectance

A. Rosencwaig, J. Opsal, D. Willenborg, 1985 .

The Inverse Born Approximation: Exact Determination of Shape of Convex Voids

Jon L. Opsal, J. H. Rose, J. Opsal, 1983 .

Multi-Technology Measurements of Amorphous Carbon Films

J. Opsal, H. Pois, J. Leng, 2005 .

Nondestructive analysis of ultrashallow junction implant damage by combined technology of thermal wave and spectroscopic methods

J. Opsal, M. Hovinen, 2002 .

Ion implant monitoring with thermal wave technology

A. Rosencwaig, J. Opsal, D. Willenborg, 1985 .

Thermal and plasma wave depth profiling in silicon

Jon Opsal, Allan Rosencwaig, A. Rosencwaig, 1985 .

Thin‐film thickness measurements with thermal waves

A. Rosencwaig, J. Opsal, D. Willenborg, 1983 .

Thin film thickness measurement with thermal waves

Jon Opsal, Allan Rosencwaig, A. Rosencwaig, 1983 .

Low temperature electron-diffusion magnetothermopower of aluminum. II. Theory

J. Opsal, D. K. Wagner, 1976 .

The magnetothermopower of molybdenum

J. Opsal, R. Fletcher, B. Thaler, 1977 .

Temperature-dependent magnetoresistance of pure aluminum and dilute Al-Ga and Al-Mg alloys

C. Chiang, J. Opsal, F. Blatt, 1976 .

Measurement of Electron-Phonon Mass Enhancement in Thermoelectricity

J. Bass, R. Fletcher, J. Opsal, 1978 .

Semiclassical theory of phonon-drag magnetothermoelectricity in metals

J. Opsal, 1977 .

Thermal‐wave depth profiling: Theory

A. Rosencwaig, J. Opsal, 1982 .

Electron-Phonon Mass Enhancement in Thermoelectricity

J. Bass, J. Opsal, B. Thaler, 1976 .

Combined beam profile reflectometry, beam profile ellipsometry and ultraviolet-visible spectrophotometry for the characterization of ultrathin oxide-nitride-oxide films on silicon

D. Aspnes, J. Opsal, J. Leng, 1999 .

Thermal Wave Imaging with Thermoacoustic Detection

J. Opsal, A. Rosencwaig, 1986, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry

Jon Opsal, M. Senko, Jingmin Leng, 1998 .

Theory of elastic wave scattering: applications of the method of optimal truncation

Jon Opsal, J. Opsal, W. Visscher, 1985 .

Progress on Ultrasonic Flaw Sizing in Turbine Engine Rotor Components: Bore and Web Geometries

T. A. Gray, James H. Rose, R. B. Thompson, 1983 .

Detection of thermal waves through modulated optical transmittance and modulated optical scattering

Jon Opsal, David L. Willenborg, Allan Rosencwaig, 1986 .

Strained-silicon metrology using a multi-technology optical system

Jon Opsal, Heath Pois, Stephen Morris, 2005, SPIE Advanced Lithography.

The mechanism of modulated optical reflectance imaging of dislocations in silicon

E. Weber, J. Opsal, J. Bailey, 1990 .

Analytic representations of the dielectric functions of crystalline and amorphous Si and crystalline Ge for very large scale integrated device and structural modeling

D. Aspnes, J. Opsal, J. Leng, 1998 .

Beam profile reflectometry: A new technique for dielectric film measurements

Jon Opsal, David L. Willenborg, Jeffrey T. Fanton, 1992 .

Novel technique for performing ellipsometric measurements in a submicrometer area

Jon Opsal, David L. Willenborg, Jeffrey T. Fanton, 1994, Optics & Photonics.

Thin film 193nm TNK measurement using multi-domain genetic algorithm (MDGA) with a combination of beam profile reflectometry (BPR), absolute ellipsometry (AE), and spectroscopic ellipsometry (SE)

Chih-Ming Ke, Pei-Hung Chen, Jeng-Horng Chen, 2003, SPIE Optics + Photonics.

Analytic representations of the dielectric functions of materials for device and structural modeling

Jon Opsal, M. Senko, David E. Aspnes, 1998 .

Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films.

Yia-Chung Chang, Jon Opsal, Guangwei Li, 2006, Journal of the Optical Society of America. A, Optics, image science, and vision.

Efficient finite-element Green's function approach for CD metrology of 3D gratings on multilayer films.

Yia-Chung Chang, J. Opsal, H. Chu, 2005 .

Fundamental solutions for real-time optical CD metrology

Yia-Chung Chang, Youxian Wen, Hanyou Chu, 2002, SPIE Advanced Lithography.

Finite difference algorithm in real-time optical CD applications

Jon Opsal, Hanyou Chu, Jingmin Leng, 2004, SPIE Advanced Lithography.

Thickness and Topography of Dielectric Dual-Sidewall Spacers on Metal Gate of DRAM Extracted by Spectroscopic Ellipsometry

Chung-I Chang, Tings Wang, Jia-Rui Hu, 2007, 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.

Temporal behavior of modulated optical reflectance in silicon

A. Rosencwaig, J. Opsal, W. Smith, 1987 .

Advances in optical carrier profiling through high-frequency modulated optical reflectance

W. Vandervorst, J. Opsal, J. Bogdanowicz, 2008 .

Physics of Thermal Wave NDE of Semiconductor Materials and Devices

A. Rosencwaig, J. Opsal, 1988 .

Subsurface Defects in Silicon Investigated by Modulated Optical Reflectance Measurements

E. Weber, J. Opsal, J. Bailey, 1989 .

Theory of Bulk and Near Surface Effects on the Modulated Optical Reflectance in Silicon

A. Rosencwaig, J. Opsal, 1988 .

Detection of Stable and Metastable Interface States in Silicon with Modulated Optical Reflectance

A. Rosencwaig, J. Opsal, D. Willenborg, 1988 .

Relaxation of ion implant damage in silicon wafers at room temperature measured by thermal waves and double implant sheet resistance

A. Rosencwaig, J. Opsal, J. Maneval, 1987 .

Broadband spectral operation of a rotating-compensator ellipsometer

Jon Opsal, M. Senko, David E. Aspnes, 1998 .

Nonlinear photothermal response in 3D geometry: A general theoretical model

A. Mandelis, A. Rosencwaig, J. Opsal, 1999 .

Quantitative characterization of ion-implanted layers in Si

A. Rosencwaig, J. Opsal, M. Hovinen, 1999 .

Nonlinear fundamental photothermal response in three-dimensional geometry: Theoretical model

Jon Opsal, Andreas Mandelis, Allan Rosencwaig, 1999 .

Calculations of Elastic Wave Scattering from Voids and Crack-Like Defects by the Method of Optimal Truncation

J. Opsal, 1981 .

Inversion of ultrasonic scattering data

J. L. Opsal, J. H. Rose, J. Opsal, 1980 .

Application of parameter estimation/system identification to quantitative ultrasonic NDE

G. D. Poe, J. L. Opsal, J. Opsal, 1981 .

Optical characterization of 193nm amorphous carbon ARC films

Jon Opsal, Jingmin Leng, Heath Pois, 2005, SPIE Advanced Lithography.

Superconductivity in lightly doped crystalline bismuth

C. Uher, J. Opsal, 1978 .

Simultaneous determination of ultra-shallow junction depth and abruptness using thermal wave technique

J. Opsal, L. Robertson, L. Nicolaides, 2004 .

Study of low energy implants for ultrashallow junctions using thermal wave and optical techniques

J. Opsal, L. Nicolaides, A. Salnick, 2003 .

Dynamics of the plasma and thermal waves in surface-modified semiconductors (invited)

J. Opsal, A. Salnick, 2003 .

Quantitative photothermal characterization of ion-implanted layers in Si

J. Opsal, A. Salnick, 2002 .

Nonlinear fundamental photothermal response: experimental results for tungsten

A. Mandelis, A. Rosencwaig, J. Opsal, 2000 .

Application of thermal wave technology to thickness and grain size monitoring of aluminum films

Jon L. Opsal, J. Opsal, 1991, Other Conferences.

Thermal-wave measurements of high-dose ion implantation

M. Taylor, J. Opsal, King-Lien Lee, 1991 .

Comment on ‘‘Spatially resolved defect mapping in semiconductors using laser‐modulated thermoreflectance’’ [Appl. Phys. Lett. 47, 1336 (1985)]

W. L. Smith, A. Rosencwaig, J. Opsal, 1986 .

A photothermal method of simultaneous determination of ultra-shallow junction depth and abruptness

J. Opsal, L. Robertson, L. Nicolaides, 2004 .

Modulated Interference Effects and Thermal Wave Monitoring of High-Dose Ion Implantation in Semiconductors

Jon Opsal, J. Opsal, 1989 .

Thermal Wave Characterization of Semiconductors and Superconductors

A. Rosencwaig, J. Opsal, D. Willenborg, 1989 .

Fundamentals of Thermal Wave Physics

J. Opsal, 1987 .

Thermal Wave Scattering

J. Opsal, 1986 .