Alan Howling

发表

Resonant rf network antennas for inductively-coupled plasma sources

Ivo Furno, Alan Howling, Ph. Guittienne, 2014 .

Electromagnetic sources of nonuniformity in large area capacitive reactors

Ch. Hollenstein, Alan Howling, Laurent Sansonnens, 2007 .

Plasma diagnostics as a tool for process optimization: the case of microcrystalline silicon deposition

Ch. Hollenstein, Alan Howling, B. Strahm, 2007 .

Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformity

Alan Howling, Ch. Hollenstein, Laurent Sansonnens, 2006 .

Helicon wave-generated plasmas for negative ion beams for fusion

Ivo Furno, Alain Simonin, Alan Howling, 2017 .

A voltage uniformity study in large-area reactors for RF plasma deposition

Alan Howling, Ch. Hollenstein, L. Sansonnens, 1997 .

Spectroscopic characterization of H 2 and D 2 helicon plasmas generated by a resonant antenna for neutral beam applications in fusion

B. P. Duval, Ivo Furno, C. Marini, 2017 .

A novel helicon plasma source for negative ion beams for fusion

B. P. Duval, Ivo Furno, C. Marini, 2016 .

Fast equilibration of silane/hydrogen plasmas in large area RF capacitive reactors monitored by optical emission spectroscopy

Alan Howling, Ch. Hollenstein, B. Strahm, 2007 .

Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part I: basic concepts

Ivo Furno, Alan Howling, Ph. Guittienne, 2015 .