F. Grangeon

Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing

F. Grangeon, Pierre Ranson, Philippe Lefaucheux, 2002 .

Applications of the cavity ring-down technique to a large-area rf-plasma reactor

A. Howling, C. Hollenstein, F. Grangeon, 1999 .

On the powder formation in industrial reactive RF plasmas

A. Howling, C. Hollenstein, F. Grangeon, 1999 .

Crossed Beam Pulsed Laser Deposition of cryolite thin films

M. Autric, F. Grangeon, L. Lambert, 1999 .

Development of an ultra-high vacuum system for space application

D. Paulin, F. Grangeon, C. Monnin, 2004 .