V. G. I. Deshmukh

Application of adaptive network theory to dry-etch monitoring and control

V. G. I. Deshmukh, D. A. O. Hope, T. I. Cox, 1991, Other Conferences.

Application Of Plasma Diagnostic Techniques To Dry Etching Process Control

T. I. Cox, V. G. I. Deshmukh, D. A. O. Hope, 1990, Other Conferences.