Ayami Yamada

Quartz crystal microbalance for real-time monitoring chlorosilane gas transport in slim vertical cold wall chemical vapor deposition reactor

S. Hara, Toshinori Takahashi, Mana Otani, 2020 .

Advantages of a slim vertical gas channel at high SiHCl3 concentrations for atmospheric pressure silicon epitaxial growth

S. Hara, Mitsuko Muroi, Kenta Irikura, 2018, Materials Science in Semiconductor Processing.

Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection

Ning Li, S. Hara, Mitsuko Muroi, 2017 .

Silicon epitaxial growth accelerated by parallel Langmuir processes using SiH2Cl2 and SiH3CH3 gases

Mitsuko Muroi, Ayami Yamada, Hitoshi Habuka, 2018, Semiconductor Science and Technology.

Deposition and etching behaviour of boron trichloride gas at silicon surface

Mitsuko Muroi, Ayami Yamada, Hitoshi Habuka, 2020 .

Parallel langmuir processes for silicon epitaxial growth in a SiHCl3-SiHx-H2 system

Ayami Yamada, Hitoshi Habuka, Ayumi Saito, 2017 .