D. Mataras

发表

EFFECT OF INTERELECTRODE SPACE ON PROPERTIES OF SiH 4 /H 2 DEPOSITION DISCHARGES OPERATING AT DIFFERENT RADIO FREQUENCIES

E. Amanatides, D. Mataras, D. Rapakoulias, 2000 .

A hybrid kinetic Monte Carlo method for simulating silicon films grown by plasma-enhanced chemical vapor deposition.

V. Mavrantzas, D. Mataras, C. Baig, 2013, The Journal of chemical physics.

SiH4 enhanced dissociation via argon plasma assistance for hydrogenated microcrystalline silicon thin-film deposition and application in tandem solar cells

J. Ni, Xiaodang Zhang, Ying Zhao, 2018, Solar Energy Materials and Solar Cells.

Temperature effect and stress on microcrystalline silicon thin films deposited under high pressure plasma conditions

E. Katsia, E. Amanatides, D. Mataras, 2006 .

Effect of plasma parameters on the amorphous to microcrystalline silicon transition

E. Katsia, E. Amanatides, D. Mataras, 2006 .

Combined effect of electrode gap and radio frequency on power deposition and film growth kinetics in SiH4/H2 discharges

E. Amanatides, D. Mataras, D. Rapakoulias, 2002 .

Frequency variation under constant power conditions in hydrogen radio frequency discharges

E. Amanatides, D. Mataras, 2001 .

Substrate holder biasing for improvement of microcrystalline silicon deposition process

S. Xiong, Xiaodang Zhang, Ying Zhao, 2008 .

Power dissipation and impedance measurements in radio‐frequency discharges

D. Mataras, D. Rapakoulias, N. Spiliopoulos, 1996 .

Simulation of the SiH () emission spectrum in a silane glow discharge and derivation of an improved set of molecular constants

D. Mataras, D. Rapakoulias, Spyros Stamou, 1997 .

Effect of frequency in the deposition of microcrystalline silicon from silane discharges

E. Amanatides, D. Mataras, D. Rapakoulias, 2001 .

Gas phase and surface kinetics in plasma enhanced chemical vapor deposition of microcrystalline silicon: The combined effect of rf power and hydrogen dilution

E. Amanatides, D. Mataras, Spyros Stamou, 2001 .

Diagnostics and Modeling of SiH4/H2 Plasmas for the Deposition of Microcrystalline Silicon: The Case of Dual‐Frequency Sources

E. Amanatides, D. Mataras, 2010 .

High pressure regime of plasma enhanced deposition of microcrystalline silicon

E. Katsia, E. Amanatides, D. Mataras, 2005 .

Effect of substrate bias on the plasma enhanced chemical vapor deposition of microcrystalline silicon thin films

Xiaodang Zhang, Ying Zhao, E. Amanatides, 2008 .

ECWR plasma enhanced chemical vapour deposition of microcrystalline silicon thin films

E. Farsari, A. Kalampounias, D. Mataras, 2014 .

Disilane as a growth rate catalyst of plasma deposited microcrystalline silicon thin films

A. Kalampounias, E. Amanatides, D. Mataras, 2016 .

Development of a hollow cathode plasma source for microcrystalline silicon thin films deposition

D. Mataras, D. Rapakoulias, E. Amanatides, 2011 .

Modeling and experiments of high-pressure VHF SiH4/H2 discharges for higher microcrystalline silicon deposition rate ☆

Xiaodang Zhang, Ying Zhao, E. Amanatides, 2008 .

Power consumption effect on the microcrystalline silicon deposition process: a comparison between model and experimental results

E. Amanatides, D. Mataras, D. Rapakoulias, 2005 .

Total SiH4/H2 pressure effect on microcrystalline silicon thin films growth and structure

E. Katsia, E. Amanatides, D. Mataras, 2005 .

Combination of plasma diagnostics and modelling for the investigation of microcrystalline silicon deposition process

E. Amanatides, D. Mataras, D. Rapakoulias, 2002, Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002..

Deposition rate optimization in SiH4/H2 PECVD of hydrogenated microcrystalline silicon

E. Amanatides, D. Mataras, D. Rapakoulias, 2001 .

Disilane addition versus silane-hydrogen flow rate effect on the PECVD of silicon thin films

A. Kalampounias, E. Amanatides, D. Mataras, 2016 .

Plasma enhanced chemical vapor deposition of silicon under relatively high pressure conditions

E. Amanatides, D. Mataras, B. Lykas, 2005, IEEE Transactions on Plasma Science.

Measurement of intrinsic and laser heating-induced stress in microcrystalline silicon thin films

E. Farsari, G. Papatheodorou, A. Kalampounias, 2016 .

Covalent immobilization of liposomes on plasma functionalized metallic surfaces.

E. Farsari, S. Antimisiaris, S. Mourtas, 2011, Colloids and surfaces. B, Biointerfaces.

Wetting Properties of Transparent Anatase/Rutile Mixed Phase Glancing Angle Magnetron Sputtered Nano-TiO2 Films

E. Farsari, D. Mataras, V. Vrakatseli, 2020, Micromachines.

Comparative study of RF reactive magnetron sputtering and sol-gel deposition of UV induced superhydrophilic TiOx thin films

E. Amanatides, D. Mataras, V. Vrakatseli, 2016 .

Photoinduced superhydrophilicity of amorphous TiOx-like thin films by a simple room temperature sol-gel deposition and atmospheric plasma jet treatment

D. Mataras, E. Amanatides, V. Vrakatseli, 2014 .

RF power effect on TEOS/O2 PECVD of silicon oxide thin films

E. Amanatides, D. Mataras, C. Voulgaris, 2005 .

Influence of plasma conditions on the defect formation mechanism in amorphous hydrogenated silicon

P. Kounavis, D. Mataras, D. Rapakoulias, 1994 .

Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO2 Thin Films

Alexandros Kalarakis, A. Kalampounias, E. Amanatides, 2018, Micromachines.

Influence of cw CO2-laser radiation on the amorphous-to-microcrystalline phase transition in a-Si:H films: a Raman spectroscopic study

E. Farsari, G. Papatheodorou, A. Kalampounias, 2014 .

Effective capture rates of carriers in amorphous hydrogenated silicon

P. Kounavis, D. Mataras, D. Rapakoulias, 1996 .

Diagnostics of Amorphous Silicon (a-Si) Plasma Processes

G. Turban, B. Drévillon, D. Mataras, 1995 .

Staphylococcus epidermidis adhesion to He, He/O(2) plasma treated PET films and aged materials: contributions of surface free energy and shear rate.

E. Amanatides, D. Mataras, Y. Missirlis, 2008, Colloids and surfaces. B, Biointerfaces.

Heterogeneous Catalysis in Interaction of Plasma Excited Species with Surfaces

D. Mataras, D. Rapakoulias, S. Cavadias, 1995 .

Detection of powder formation in SiH4/H2 glow discharges

E. Amanatides, D. Mataras, G. Alexiou, 2016 .

Practical silicon deposition rules derived from silane monitoring during plasma-enhanced chemical vapor deposition

C. Ballif, S. Wolf, B. Demaurex, 2015 .

Interelectrode space effect on power dissipation and silicon oxide thin film growth from TEOS/O2 discharges

E. Amanatides, D. Mataras, A. Panou, 2005 .

Spatial rotational temperature and emission intensity profiles in silane plasmas

D. Mataras, D. Rapakoulias, Spyros Stamou, 1998 .

Electrical and optical properties of CH4/H2 RF plasmas for diamond-like thin film deposition

E. Amanatides, D. Mataras, 2005 .

Spatial profiles of reactive intermediates in rf silane discharges

D. Mataras, D. Rapakoulias, S. Cavadias, 1989 .

Plasma 2D modeling and diagnostics of DLC deposition on PET

P. Gkotsis, E. Amanatides, D. Mataras, 2006 .

PECVD of hydrogenated silicon thin films from SiH4+H2+Si2H6 mixtures

E. Amanatides, D. Mataras, D. Rapakoulias, 2004 .

Improved Surface Energy Analysis for Plasma Treated PET Films

P. Nikolopoulos, E. Amanatides, D. Mataras, 2007 .

Simulation of cylindrical electron cyclotron wave resonance argon discharges

D. Mataras, D. Rapakoulias, E. Amanatides, 2011 .

Exploration of the deposition limits of microcrystalline silicon

D. Mataras, 2005 .

PLASMA ENHANCED CVD OF AMORPHOUS HYDROGENATED SILICON INVESTIGATED BY OPTICAL DIAGNOSTICS

D. Mataras, D. Rapakoulias, 1992 .

On the effect of the substrate pretreatment parameters on the composition and structure of plasma deposited SiO 2 thin films

E. Amanatides, D. Mataras, D. Rapakoulias, 2005 .

RF power and SiOxCyHz deposition efficiency in TEOS/O2 discharges for the corrosion protection of magnesium alloys

Sabrina Grassini, Emma Paola Maria Virginia Angelini, Francesco Rosalbino, 2006 .

Plasma emission diagnostics for the transition from microcrystalline to amorphous silicon solar cells

B. Rech, E. Amanatides, D. Mataras, 2005 .

On the reliable probing of discrete ‘plasma bullet’ propagation

E. Amanatides, D. Mataras, K. Gazeli, 2018 .

Plasma surface treatment of polyethylene terephthalate films for bacterial repellence

E. Amanatides, D. Mataras, Y. Missirlis, 2006 .

Nitrogen ion dynamics in low‐pressure nitrogen plasma and plasma sheath

D. Mataras, D. Rapakoulias, S. Cavadias, 1990 .

Plasma Treated and a‐C:H Coated PET Performance in Inhibiting Bacterial Adhesion

E. Amanatides, D. Mataras, Y. Missirlis, 2007 .

Modeling and Diagnostics of He Discharges for Treatment of Polymers

E. Amanatides, D. Mataras, 2008 .