C. Hohle

发表

Detailed characterization of hydrogen silsesquioxane for e-beam applications in a dynamic random access memory pilot line environment

C. Hohle, Katja Keil, Johannes Kretz, 2009 .

Surface roughness investigation of 157- and 193-nm polymer platforms using different etch conditions

Andrew R. Romano, F. Houlihan, C. Hohle, 2005 .

Novel functional materials based on triarylamines–synthesis and application in electroluminescent devices and photorefractive systems

D. Haarer, H. Schmidt, M. Thelakkat, 1999 .

Synthesis and characterization of novel photorefractive low molecular weight glasses

Christoph Hohle, Stefan Schloter, Dietrich Haarer, 1998, Optics & Photonics.

Fabrication of metrology test structures for future technology nodes using high-resolution variable-shaped e-beam direct write

László Szikszai, Philipp Jaschinsky, Katja Keil, 2009, Advanced Lithography.

15days electron beam exposure for manufacturing of large area silicon based NIL master

M. Freitag, J. Paul, C. Hohle, 2013 .

Scaling and optimization of high-density integrated Si-capacitors

W. Weinreich, J. Paul, J. Sundqvist, 2013, 2013 International Semiconductor Conference Dresden - Grenoble (ISCDG).

Advanced module for model parameter extraction using global optimization and sensitivity analysis for electron beam proximity effect correction

Christoph Hohle, Manuela Gutsch, Patrick Schiavone, 2012, Photomask Technology.

Photorefractive triphenylamine-based glass: a multifunctional low molecular weight compound with fast holographic response

Stephan J. Zilker, D. Haarer, M. Thelakkat, 1999 .

Characterization of charge generation and transport in a photorefractive organic glass: comparison between conventional and holographic time-of-flight experiments

Stephan J. Zilker, M. Grasruck, D. Haarer, 1999 .

Influence of the Charge Transport Characteristics on the Holographic Response of Organic Photorefractive Materials

Stephan J. Zilker, M. Grasruck, P. Strohriegl, 2001 .

Metasurfaces for colour printing

J. Martínez‐Pastor, C. Hohle, C. Zapata-Rodriguez, 2014, 2014 16th International Conference on Transparent Optical Networks (ICTON).

Dispersive hole transport in organic photorefractive glasses

Stephan J. Zilker, M. Grasruck, D. Haarer, 1999 .

Geometrically induced dose correction: method and performance results

C. Hohle, R. Galler, K.-H. Choi, 2011, European Mask and Lithography Conference.

Geometrically induced dose correction method for e-beam lithography applications

C. Hohle, R. Galler, K.-H. Choi, 2010, Photomask Technology.

Checkerboard pattern for PSF parameter determination in electron beam lithography

Philipp Jaschinsky, Katja Keil, Marc Hauptmann, 2010, European Mask and Lithography Conference.

Holographic and photoelectric characterization of a novel photorefractive organic glass

C. Hohle, M. Grasruck, Stephan J. Zilker, 1999 .