Michael T. Takac

Exact algorithm self-calibration of two-dimensional precision metrology stages

Jun Ye, Jun Ye, C. N. Berglund, 1999 .

Two-dimensional calibration artifact and measurement methodology

Richard M. Silver, Theodore D. Doiron, Michael T. Takac, 1999, Advanced Lithography.

Self-calibration in two dimensions: the experiment

Jun Ye, Roger Fabian W. Pease, Michael T. Takac, 1996, Advanced Lithography.

Self-calibration in one dimension

Michael T. Takac, 1994, Photomask Technology.

Stage Cartesian self-calibration: a second method

John M. Whittey, Michael T. Takac, 1998, Photomask Technology.

Obtaining a physical two-dimensional Cartesian reference

R. Fabian Pease, Jun Ye, Michael T. Takac, 1997 .