Harald Boettner

Design and fabrication of a novel low-cost hotplate micro gas sensor

Jan G. Korvink, J. Hildenbrand, J. Wollenstein, 2002, Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS.

Ultrathin lamellar gratings as solar-selective coatings

Harald Boettner, Rudolph H. Morf, Martin Brunotte, 1990, Other Conferences.

Monitoring processes in photoresist using infrared optical fibers and tunable diode lasers

Abraham Katzir, Maurus Tacke, Harald Boettner, 1990, Photonics West - Lasers and Applications in Science and Engineering.

Low-power micromachined structures for gas sensors with improved robustness

Carles Cane, Harald Boettner, Isabel Gracia, 2000, SPIE MOEMS-MEMS.