S. Kato
发表
Nipa Phojanamongkolkij,
Xiaoxiong Xiong,
David R. Doelling,
2013
.
Yoshiharu Namba,
Hideyuki Mori,
Kai-Wing Chan,
2002,
Applied optics.
Masanobu Hasegawa,
Hideo Yokota,
Takayuki Hasegawa,
2008,
SPIE Advanced Lithography.
Masanobu Hasegawa,
Akiyoshi Suzuki,
Katsuhiko Murakami,
2005,
SPIE Advanced Lithography.