Ville Rontu

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

E. Hæggström, S. Franssila, E. Haeggström, 2018 .

Tribological properties of thin films made by atomic layer deposition sliding against silicon

T. Sajavaara, H. Ronkainen, S. Hannula, 2018 .

Scalable Superomniphobic Surfaces

S. Franssila, V. Jokinen, Ville Rontu, 2020, Journal of Microelectromechanical Systems.

Characterization of nano-coated micro- and nanostructures by pushing

Quan Zhou, Ville Liimatainen, Maria Berdova, 2014, 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO).

Mechanical properties of atomic layer deposited Al2O3 thin films

S. Franssila, E. Haeggström, I. Kassamakov, 2020 .

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

S. Franssila, R. Puurunen, Ville Rontu, 2015 .

Mechanical properties and reliability of aluminum nitride thin films

M. Paulasto-Kröckel, Ville Rontu, A. Torkkeli, 2019, Journal of Alloys and Compounds.

Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support.

S. Franssila, G. Scotti, Ville Rontu, 2017, Chemistry.

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

T. Sajavaara, S. Franssila, M. Paulasto-Kröckel, 2018 .