G-R. Yang

发表

Reduced sulfur-terminated silanes to promote the interaction of palladium(II) hexafluoroacetylacetonate with dielectric surfaces

T. Lu, J. Senkevich, C. Mitchell, 2003 .

Study of fluorine diffusion in metallized polymers using ion beam techniques

J. McDonald, Bin Wang, T. Lu, 1999 .

The facile surface modification of poly(p-xylylene) ultrathin films

T. Lu, J. Senkevich, G-R. Yang, 2003 .

Surface reaction and stability of parylene N and F thin films at elevated temperatures

Peter K. Wu, P. K. Wu, T. Lu, 1995 .

Retardation of oxidation in Co nanocolumns: Scanning tunneling microscopy study

T. Lu, G. Wang, G-R. Yang, 2002 .

Comparison of low-temperature oxidation of crystalline Si and B with a-Si:B alloy: An x-ray photoelectron spectroscopy study

G-R. Yang, B. Y. Tong, S. Dabral, 1997 .

Secondary ion mass spectrometry study of the thermal stability of Cu/refractory metal/Si structures

T. Lu, H. Bakhru, G-R. Yang, 1991 .

Improved growth and thermal stability of Parylene films

Bin Wang, J. McDonald, T. Lu, 1997 .

Hindered Copper Ion Penetration in Parylene-N Films

T. Lu, J. Senkevich, G-R. Yang, 2003 .

Plasma surface modification for ion penetration barrier in organosiloxane polymer

S. Murarka, T. Lu, G-R. Yang, 2002 .

The Effect of Interfacial Chemistry on Metal Ion Penetration into Polymeric Films

S. Murarka, T. Lu, G-R. Yang, 2002 .

Copper Wetting of a Tetrasulfide Self-Assembled Monolayer

Gwo-Ching Wang, T. Lu, J. Senkevich, 2002 .

Chemical interactions at Ta/fluorinated polymer buried interfaces

J. McDonald, T. Lu, Yiping Zhao, 1998 .

Interaction of amorphous fluoropolymer with metal

Peter K. Wu, P. K. Wu, T. Lu, 1994 .

Vapor deposition of parylene‐F by pyrolysis of dibromotetrafluoro‐p‐xylene

Peter K. Wu, J. McDonald, T. Lu, 1993 .

Ion Beam Techniques for Low K Materials Characterization

P. Wayner, J. McDonald, S. Nitta, 1998 .

Low‐resistivity Cu thin‐film deposition by self‐ion bombardment

T. Lu, G-R. Yang, P. Bai, 1990 .

Vapor Deposition Of Very Low K Polymer Films, Poly(Naphthalene), Poly(Fluorinated Naphthalene)

T. Lu, G-R. Yang, C. Lang, 1995 .

Characterization of Cu-Al alloy/SiO 2 interface microstructure

S. Murarka, T. Lu, E. Barnat, 2000 .

High deposition rate parylene films

Toh-Ming Lu, William N. Gill, T. Lu, 1998 .

Study on the interfaces of Cu/PA‐N and PA‐N/Si by secondary ion mass spectroscopy and scanning electron microscopy

J. McDonald, T. Lu, G-R. Yang, 1996 .

TEXTURE OF VAPOR DEPOSITED PARYLENE THIN FILMS

J. McDonald, T. Lu, G-R. Yang, 1994 .

Structural and electro‐optical investigation of a vapor‐deposited chromophore‐polymer thin film

Peter K. Wu, T. Lu, G-R. Yang, 1995 .

Vacuum deposition of nonlinear chromophore‐polymer composite thin films

Peter K. Wu, P. K. Wu, J. McDonald, 1994 .

Deposition of Cu film on SiO2 using a partially ionized beam

T. Lu, G-R. Yang, L. Lau, 1990 .

Compositional control of plasma enhanced chemical vapor deposited diamond-like carbon/SiO2 nanocomposite thin films

T. Lu, J. Senkevich, G-R. Yang, 2003 .

X-ray Photoelectron Spectroscopic Studies of Cu-AI alloy/SiO 2 Interfaces

S. Murarka, T. Lu, G-R. Yang, 1999 .

Thermal stability of xerogel films

T. Lu, H. Bakhru, J. B. Fortin, 2001 .

Boron Induced Changes in the Structural Properties of Amorphous Silicon Boron Alloys

G-R. Yang, B. Y. Tong, M. Abburi, 1995 .

Raman Studies of Boron Induced Structural Changes in Amorphous Silicon-Boron Alloys

S. K. Wong, G-R. Yang, B. Y. Tong, 1989 .

Studying low-pressure chemical vapor deposition a-Si:B alloys by optical spectroscopy

Yiping Zhao, G-R. Yang, B. Y. Tong, 1998 .

Intrinsic Cu gettering at a thermally grown SiO2/Si interface

T. Lu, G-R. Yang, P. Bai, 1990 .

Thermal stability of mercaptan terminated self-assembled multilayer films on SiO2 surfaces

T. Lu, J. Senkevich, G-R. Yang, 2002 .

Study of amorphous Ta2O5 thin films by DC magnetron reactive sputtering

E. J. Rymaszewski, T. Lu, G-R. Yang, 1997 .

Room-temperature epitaxy of Cu on Si(111) using partially ionized beam deposition

T. Lu, G-R. Yang, D. Knorr, 1990 .

Growth of epitaxial Ag/Si films by the partially ionized beam deposition technique

T. Lu, G-R. Yang, T. C. Nason, 1991 .

Ftir and UV Study of Amorphous Silicon-Boron Alloys Deposited by LPCVD

Yiping Zhao, G-R. Yang, B. Y. Tong, 1996 .

Study of silver diffusion into Si(111) and SiO2 at moderate temperatures

T. Lu, K. Park, G-R. Yang, 1991 .

XPS and AFM study of chemical mechanical polishing of silicon nitride

R. Gutmann, T. Chow, Yiping Zhao, 1998 .

Amorphous Si:B films: Microstructure and electrical properties

S. Soss, Y. Zhu, J. Du, 1994 .

Study of Oxidation Properties of Amorphous Si:B Films

S. K. Wong, G-R. Yang, B. Y. Tong, 1991 .

Aqueous ammonium sulfide to modify the surface of low κ dielectric thin films

T. Lu, J. Senkevich, G-R. Yang, 2003 .

Low Temperature Processing for Multilevel Interconnection and Packaging

J. McDonald, T. Lu, G-R. Yang, 1990 .

Study of interface impurity sputtering in partially ionized beam deposition of Cu on Si

T. Lu, G-R. Yang, P. Bai, 1990 .

Self‐cleaning effect in partially ionized beam deposition of Cu films

T. Lu, G-R. Yang, W. Lau, 1989 .

X-ray photoelectron spectroscopy study of Al/Ta2O5 and Ta2O5/Al buried interfaces

E. J. Rymaszewski, T. Lu, G-R. Yang, 1997 .

Metal/polymer interface adhesion by partially ionized beam deposition

P. K. Wu, J. McDonald, T. Lu, 1996 .

Fluorinated Parylene as an Interlayer Dielectric for Thin Film MCM's

J. McDonald, Xicheng Zhang, T. Lu, 1992 .

Diffusion and Adhesion of Cu/Parylene

J. McDonald, T. Lu, G-R. Yang, 1990 .

α α’ α‘ α‴ Poly‐tetrafluoro‐p‐xylylene as an interlayer dielectric for thin film multichip modules and integrated circuits

J. McDonald, T. Lu, H. Bakhru, 1993 .

Reduction in diffusion of copper in parylene by thermal pretreatment

J. McDonald, T. Lu, H. Bakhru, 1992 .

Secondary ion mass spectroscopic characterization of silver and aluminum diffusion in parylene

J. McDonald, T. Lu, H. Bakhru, 1992 .

Vapor Deposition of Parylene Films from Precursors

P. K. Wu, J. McDonald, T. Lu, 1992 .

The addition of surfactant to slurry for polymer CMP: effects on polymer surface, removal rate and underlying Cu

J. Neirynck, R. Gutmann, S. Murarka, 1996 .

Manipulating the column tilt angles of nanocolumnar films by glancing-angle deposition

T. Lu, Y. Zhao, G. Wang, 2002 .

Evolution of the Cu-Al Alloy/ SiO2 Interfaces during Bias Temperature Stressing

S. Murarka, T. Lu, G-R. Yang, 2001 .

Selective Deposition of Ultrathin Poly(p-xylene) Films on Dielectrics Versus Copper Surfaces

T. Lu, J. Senkevich, G-R. Yang, 2004 .

Substrate-independent sulfur-activated dielectric and barrier-layer surfaces to promote the chemisorption of highly polarizable metallorganics

T. Cale, W. Lanford, Gwo-Ching Wang, 2004 .

Interactions between silica xerogel and tantalum

P. Wayner, W. Lanford, T. Lu, 2001 .