G. Peterson

发表

Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers

G. G. Peterson, J. McDonald, T. Lu, 2003 .

Surface chemistry of HF passivated silicon: X-ray photoelectron and ion scattering spectroscopy results

G. G. Peterson, G. Peterson, B. Weinberger, 1986 .

Low-temperature chemical vapor deposition of tantalum nitride from tantalum pentabromide for integrated circuitry copper metallization applications

G. G. Peterson, H. Frisch, A. Kaloyeros, 1999 .

Superconducting thin films of Y‐Ba‐Cu‐O produced by neodymium:yttrium aluminum garnet laser ablation

G. G. Peterson, G. Peterson, B. Weinberger, 1988 .

High temperature superconducting thin films: The physics of pulsed laser ablation

G. G. Peterson, M. Lindsay, G. Peterson, 1989 .

Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization

G. G. Peterson, A. Kaloyeros, Guillermo M. Nuesca, 1999 .

Tantalum Nitride Films Grown by Inorganic Low Temperature Thermal Chemical Vapor Deposition Diffusion Barrier Properties in Copper Metallization

G. G. Peterson, H. Frisch, A. Kaloyeros, 1999 .

The Effects of Processing Parameters in the Low‐Temperature Chemical Vapor Deposition of Titanium Nitride from Tetraiodotitanium

A. Kaloyeros, A. Knorr, G. Peterson, 1998 .

Barrier Properties of Titanium Nitride Films Grown by Low Temperature Chemical Vapor Deposition from Titanium Tetraiodide

G. G. Peterson, A. Kaloyeros, D. Manger, 1997 .

ESCA signal intensity dependence on surface area (roughness)

G. G. Peterson, E. M. Butler, G. Peterson, 1982 .

ChemInform Abstract: Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt.

A. Kaloyeros, Guillermo M. Nuesca, G. Peterson, 2001 .

Improvement of polycrystalline Y–Ba–Cu–O by the addition of silver

G. G. Peterson, G. Peterson, B. Weinberger, 1988 .

Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications

G. G. Peterson, E. Eisenbraun, A. Kaloyeros, 2001 .

The microstructure and microchemistry of a thermal-diffusion-boronized Co-Cr-W-C alloy

G. G. Peterson, C. V. Cooper, G. Peterson, 1990 .

Influence of the interfacial oxide on titanium silicide formation by rapid thermal annealing

G. G. Peterson, Owen K. Wu, A. N. Saxena, 1984 .

In Situ Studies of the Nucleation Mechanisms of Tris(cyclopentadienyl)Cerium as Cerium Dopant Source in SrS:Ce Thin Films for Electroluminescent Displays

Anna W. Topol, A. Kaloyeros, G. Peterson, 2001 .

Barrier Properties of Titanium Nitride Films Grown by Low Temperature Chemical Vapor Deposition from Titanium Tetraiodide.

A. Kaloyeros, D. Manger, A. Paranjpe, 1997 .

Measurement of aluminium concentration in GaAlAs epitaxial layers by double-axis X-ray diffraction

G. G. Peterson, B. Tanner, G. Peterson, 1988 .

Chemical vapor deposition of copper from CuI hexafluoroacetylacetonate trimethylvinylsilane for ultralarge scale integration applications

James F. Loan, A. Kaloyeros, D. Manger, 1996 .

Nature of indigenous sulfur segregated to the free metal surface and to the scale-metal interface

G. G. Peterson, G. Peterson, J. Smeggil, 1988 .