A. Theodoropoulou

Model reduction for optimization of rapid thermal chemical vapor deposition systems

E. Zafiriou, R. Adomaitis, A. Theodoropoulou, 1998 .

Inverse model-based real-time control for temperature uniformity of RTCVD

Evanghelos Zafiriou, A. Theodoropoulou, Raymond A. Adomaitis, 1999 .

Model reduction and temperature uniformity control for rapid thermal chemical vapor deposition reactors

Artemis-Georgia Theodoropoulou, A. Theodoropoulou, 1998 .