Thomas Beckenbach

Effective modeling of high-energy laboratory-based x-ray phase contrast imaging utilizing absorption masks or gratings

M. Endrizzi, A. Olivo, I. Buchanan, 2020, Journal of Applied Physics.

Influence of secondary effects in the fabrication of submicron resist structures using deep x-ray lithography

Pascal Meyer, Jürgen Mohr, A. Faisal, 2019, Journal of Micro/Nanolithography, MEMS, and MOEMS.

Investigation on the mechanical interface stability of curved high aspect ratio x-ray gratings made by deep x-ray lithography

P. Meyer, J. Korvink, S. Prevrhal, 2022, Journal of Micro/Nanopatterning, Materials, and Metrology.

Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube

Franz Pfeiffer, Julia Herzen, Pascal Meyer, 2021, Journal of Micro/Nanopatterning, Materials, and Metrology.