W. Dekkers

Ultrahigh Capacitance Density for Multiple ALD-Grown MIM Capacitor Stacks in 3-D Silicon

M. Kaiser, J. Klootwijk, F. Roozeboom, 2008, IEEE Electron Device Letters.

Deep Reactive Ion Etching of Through Silicon Vias

Fred Roozeboom, Wouter Dekkers, Eric Cornelis Egbertus Van Grunsven, 2008 .

Functionalizing the rear scatterer in a luminescent solar concentrator

M. Debije, W. Dekkers, 2012 .

Spontaneous nanoclustering of ZrO2 in atomic layer deposited LayZr1−yOx thin films

M. Kaiser, E. Tois, F. Roozeboom, 2008 .