M. Thomas

High Performances 3D Damascene MIM Capacitors Integrated in Copper Back-End Technologies

A. Farcy, S. Crémer, C. Richard, 2006, 2006 Bipolar/BiCMOS Circuits and Technology Meeting.

Impact of Design on High-Frequency Performance of Advanced MIM Capacitors Using Si $_{3}$ N $_{4}$ Dielectric Layers

A. Farcy, T. Lacrevaz, C. Bermond, 2008 .

Impact of Design on High-Frequency Performance of Advanced MIM Capacitors Using Si $_{3}$N $_{4}$ Dielectric Layers

A. Farcy, T. Lacrevaz, C. Bermond, 2005, IEEE Transactions on Components and Packaging Technologies.

High frequencies characterization of Cu-MIM capacitors in parallel configuration for advanced integrated circuits

O. Cueto, A. Farcy, T. Lacrevaz, 2006 .

Design improvement of RF 3D MIM damascene capacitor

A. Haen, A. Farcy, S. Crémer, 2007, ESSDERC 2007 - 37th European Solid State Device Research Conference.