P. Pekko

发表

Wideband Microwave Power Sensor Based on MEMS Technology

H. Seppa, T. Vaha-Heikkila, A. Alastalo, 2004, 2004 Conference on Precision Electromagnetic Measurements.

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

M. Prunnila, T. Pensala, J. Dekker, 2014, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

A 3D micromechanical compass

Aarne Oja, Hannu Kattelus, Heikki Kuisma, 2008 .

“Plug-up”–a new concept for fabricating SOI MEMS devices

T. Mattila, J. Kiihamäki, H. Kattelus, 2004 .

Long term stability and quality factors of degenerately n-type doped silicon resonators

M. Prunnila, T. Pensala, J. Dekker, 2014, 2014 IEEE International Frequency Control Symposium (FCS).

Experimental Determination of the Temperature Dependency of the Elastic Constants of Degenerately Doped Silicon

M. Prunnila, T. Pensala, J. Dekker, 2013, 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC).

Tetrahedral amorphous carbon deposited with the pulsed plasma arc-discharge method as a protective coating against solid impingement erosion

P. Pekko, 2000 .

Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films

P. Pekko, M. Hakovirta, V. Tiainen, 1999 .

3D Micromechanical Compass

Aarne Oja, Hannu Kattelus, Heikki Kuisma, 2007 .

Modular integration of CMOS and SOI-MEMS using "plug-up" concept

H. Ronkainen, J. Kiihamaki, P. Pekko, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

"Plug-up"-a new concept for fabricating SOI MEMS devices

J. Kiihamaki, P. Pekko, T. Mattila, 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003..

The counterface, surface smoothness, tolerances, and coatings in total joint prostheses.

R Lappalainen, A. Anttila, Y. Konttinen, 1999, Clinical orthopaedics and related research.

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

M. Prunnila, T. Pensala, J. Dekker, 2015, 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum.

Design Rules for Temperature Compensated Degenerately n-Type-Doped Silicon MEMS Resonators

Mika Prunnila, Panu Pekko, Tuomas Pensala, 2015, Journal of Microelectromechanical Systems.

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

M. Prunnila, T. Pensala, J. Dekker, 2014, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.