Y. Nishimori

Photothermal excitation of a single-crystalline silicon cantilever for higher vibration modes in liquid

H. Kawakatsu, S. Nishida, D. Kobayashi, 2009 .

Analysis of a Comb-Drive Actuator Taking the Depletion Layer into Consideration

Gen Hashiguchi, Masakazu Sugiyama, Seiji Samukawa, 2010 .

Modeling of Vibrating-Body Field-Effect Transistors Based on the Electromechanical Interactions Between the Gate and the Channel

S. Samukawa, K. Kakushima, M. Sugiyama, 2012, IEEE Transactions on Electron Devices.

Low-damage silicon etching using a neutral beam

S. Samukawa, M. Sugiyama, T. Kubota, 2013 .

Effect of neutral beam etching on mechanical property of microcantilevers

S. Samukawa, M. Sugiyama, G. Hashiguchi, 2013 .