Hyo-Chang Lee

发表

Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics

Hyo-Chang Lee, 2018 .

Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

C. Chung, Duksun Han, Hyo-Chang Lee, 2013 .

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

Young Do Kim, C. Chung, Young-cheol Kim, 2013 .

A study on plasma parameters in Ar/SF6 inductively coupled plasma

C. Chung, Hyo-Chang Lee, Seung-Ju Oh, 2017 .

Global model including multistep ionizations in helium plasmas

C. Chung, Hyo-Chang Lee, Seung-Ju Oh, 2015 .

A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma

C. Chung, Young-cheol Kim, Hyo-Chang Lee, 2015 .

Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas.

C. Chung, Young-cheol Kim, Hyo-Chang Lee, 2013, The Review of scientific instruments.

Noninvasive method to measure the ion flux in capacitive discharge

C. Chung, Hyo-Chang Lee, Min-Hyong Lee, 2007 .

Study on CO 2 Decomposition using Ar/CO 2 Inductively Coupled Plasma

C. Chung, Kwan-Yong Kim, Kyung-Hyun Kim, 2015 .

Correlation between vibrational temperature of N2 and plasma parameters in inductively coupled Ar/N2 plasmas

C. Chung, Hyo-Chang Lee, Yu. S. Kim, 2015 .

Probe diagnostics in the far scrape-off layer plasma of Korea Superconducting Tokamak Advanced Research tokamak using a sideband harmonic method.

C. Chung, Hyo-Chang Lee, Suk-Ho Hong, 2015, The Review of scientific instruments.

Low energy electron heating and evolution of the electron energy distribution by diluted O2 in an inductive Ar/O2 mixture discharge

C. Chung, Hyo-Chang Lee, Min-Hyong Lee, 2010 .

Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas

C. Chung, Hyo-Chang Lee, J. Kim, 2019, Applied Physics Letters.

Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling

C. Chung, Hyo-Chang Lee, 2015, Scientific Reports.

Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge

C. Chung, Hyo-Chang Lee, 2012 .

Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas

C. Chung, Hyo-Chang Lee, Min-Hyong Lee, 2008 .

Surface structurization and control of CuS particle size by discharge mode of inductively coupled plasma and vapor-phase sulfurization

E. Yoon, Hyeji Park, Sang-Woo Kang, 2018, Plasma Sources Science and Technology.

Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma

C. Chung, Hyo-Chang Lee, Min-Hyong Lee, 2009 .

Commercial development and experience with catalytic ozone abatement in jet aircraft

R. Farrauto, R. Heck, Hyo-Chang Lee, 1992 .

Generation of carbon nanowhiskers, nanotips, and nanodots by controlling plasma environment: Ion energy and radical effects

E. Yoon, Hyo-Chang Lee, Jin-Tae Kim, 2020, Carbon.

Directly grown Te nanowire electrodes and soft plasma etching for high-performance MoTe2 field-effect transistors

J. H. Kim, E. Yoon, Dong-Ho Kim, 2021 .

Observation of pressure gradient and related flow rate effect on the plasma parameters in plasma processing reactor

C. Chung, Hyo-Chang Lee, S. Moon, 2011 .

Enhanced Plasma Uniformity in RF Plasma With Side Multihole

C. Chung, Hyo-Chang Lee, 2014, IEEE Transactions on Plasma Science.

Discharge mode transition and hysteresis in inductively coupled plasma

C. Chung, Hyo-Chang Lee, Donghwan Kim, 2013 .

Comparisons of the electrical characteristics by impedance matching conditions on the E–H and H–E transition and the hysteresis of inductively coupled plasma

C. Chung, Hyo-Chang Lee, 2012 .

Characterization of particle generated during plasma-enhanced chemical vapor deposition on amorphous carbon layer using particle beam mass spectrometer

Sang-Woo Kang, S. H. Park, Taesung Kim, 2018 .

Catalyst deactivation due to transient behavior in nitric acid production

R. Farrauto, Hyo-Chang Lee, 1989 .

Ammonia oxidation catalysts with enhanced activity.

R. Farrauto, Hyo-Chang Lee, 1990 .

Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating

Y. Im, Hyo-Chang Lee, D. Kwon, 2020 .

Evolution of electron temperature in inductively coupled plasma

C. Chung, Hyo-Chang Lee, Jung-hyung Kim, 2017 .

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

C. Chung, Hyo-Chang Lee, Jung-Kyu Lee, 2010 .

Measurement of sheath thickness at a floating potential

C. Chung, Hyo-Chang Lee, Se-jin Oh, 2014 .

Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges

J. Schulze, Z. Donkó, Hyo-Chang Lee, 2019, Physics of Plasmas.

Effect of RF Bias on Electron Energy Distributions and Plasma Parameters in Inductively Coupled Plasma

C. Chung, Hyo-Chang Lee, 2012 .

Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma

J. Bang, C. Chung, Hyo-Chang Lee, 2011 .

Plasma diagnostic method using intermodulation frequencies in a Langmuir probe

C. Chung, Hyo-Chang Lee, Donghwan Kim, 2013 .

Flat cutoff probe for real-time electron density measurement in industrial plasma processing

D. H. Choi, Hyo-Chang Lee, S. You, 2020, Plasma Sources Science and Technology.

Discharge dynamics and plasma density recovery by on/off switches of additional gas

C. Chung, Hyo-Chang Lee, D. Kwon, 2016 .

A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model

C. Chung, Hyo-Chang Lee, Young-do Kim, 2013 .

Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias

C. Chung, Hyo-Chang Lee, Seung-Ju Oh, 2012 .

E-H heating mode transition in inductive discharges with different antenna sizes

C. Chung, Hyo-Chang Lee, 2015 .

Effect of antenna size on electron kinetics in inductively coupled plasmas

C. Chung, Hyo-Chang Lee, 2013 .

Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases

C. Chung, Young-cheol Kim, Hyo-Chang Lee, 2013 .

Pulsed plasma measurement method using harmonic analysis

C. Chung, Hyo-Chang Lee, Donghwan Kim, 2015 .

Control of electron energy distribution by adding a pulse inductive field in capacitive discharge

C. Chung, Hyo-Chang Lee, 2014 .

Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

Jong-Ryul Jeong, Hyo-Chang Lee, W. Chegal, 2021, Physics of Plasmas.

Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma

C. Chung, Hyo-Chang Lee, Seung-Ju Oh, 2015, IEEE Transactions on Plasma Science.

Control of plasma density distribution via wireless power transfer in an inductively coupled plasma

Hee-Jin Lee, C. Chung, Young-cheol Kim, 2013 .

Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

C. Chung, Hyo-Chang Lee, M. Lee, 2010 .

Exploring the nonextensive thermodynamics of partially ionized gas in magnetic field.

Hyo-Chang Lee, J. Kim, Geunwoo Go, 2021, Physical review. E.

Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas

C. Chung, Hyo-Chang Lee, Donghwan Kim, 2017 .

Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge

C. Chung, Hyo-Chang Lee, Youngkwang Lee, 2013 .

Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas

J. Bang, C. Chung, Hyo-Chang Lee, 2011 .

Impedance transition and series resonance between bulk plasma and sheath in biased inductively coupled plasma

C. Chung, Hyo-Chang Lee, 2010 .

Mechanism of solid-state plasma-induced dewetting for formation of copper and gold nanoparticles.

C. Chung, Hyo-Chang Lee, Jung-Joong Lee, 2013, Journal of Nanoscience and Nanotechnology.

Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing

C. Chung, Hyo-Chang Lee, 2015 .

Gallium nitride nanoparticle synthesis using nonthermal plasma with gallium vapor

H. Ruh, Hyo-Chang Lee, D. Seong, 2018, Current Applied Physics.

Colorimetric polydiacetylene for plasma diagnostics

C. Chung, Jong-Man Kim, Seongho Jeon, 2014 .

Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

J. Bang, C. Chung, Duksun Han, 2015 .

E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas

C. Chung, Hyo-Chang Lee, Jung-Kyu Lee, 2011 .

Non-invasive probe diagnostic method for electron temperature and ion current density in atmospheric pressure plasma jet source

C. Chung, G. Cho, Jun-Hyeon Moon, 2015 .

Extended dielectric relaxation scheme for fluid transport simulations of high density plasma discharges

Hyo-Chang Lee, H. Choe, N. Yoon, 2014 .

Investigation of the Boltzmann relation in plasmas with non-Maxwellian electron distribution

C. Chung, Hyo-Chang Lee, J. Kim, 2014 .

Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

C. Chung, Young-cheol Kim, Hyo-Chang Lee, 2011, IEEE Transactions on Plasma Science.

Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge

C. Chung, Hyo-Chang Lee, 2012 .

Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes

C. Chung, Hyo-Chang Lee, 2012 .

Preface to Special Topic “Plasma Physics and Science in Current and Next Generation Semiconductor Process”: Invited papers from The 8th International Conference on Microelectronics and Plasma Technology

Hyo-Chang Lee, 2022, Physics of Plasmas.

Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas

C. Chung, Young-cheol Kim, Hyo-Chang Lee, 2015 .

Noninvasive method to measure the electron temperature in radio frequency capacitively coupled plasmas

C. Chung, Hyo-Chang Lee, J. Kim, 2021 .

Study on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas

C. Chung, Young-cheol Kim, Hyo-Chang Lee, 2014, IEEE Transactions on Plasma Science.

Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas

C. Chung, Hyo-Chang Lee, Min-Hyong Lee, 2012 .

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas.

C. Chung, Hyo-Chang Lee, Min-Hyong Lee, 2010, Physical review. E, Statistical, nonlinear, and soft matter physics.

Circuit model for flat cut-off probes with coplanar capacitance

Hyo-Chang Lee, K. You, H. Yeom, 2021 .

Critical Need for a National Initiative in Low Temperature Plasma Research

Yevgeny Raitses, Hyo-Chang Lee, Igor Kaganovich, 2020, 2007.09199.

Inductively coupled RF heating of nano-particle for non-invasive and selective cancer cell destruction

C. Chung, Hyo-Chang Lee, Seung-Ju Oh, 2010, 10th IEEE International Conference on Nanotechnology.