Peter Ekberg

发表

Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data.

Ernest W Chang, Lars Mattsson, Peter Ekberg, 2014, Journal of the Optical Society of America. A, Optics, image science, and vision.

A new general approach for solving the self-calibration problem on large area 2D ultra-precision coordinate measurement machines

Lars Mattsson, Peter Ekberg, Lars Stiblert, 2014 .

Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels.

Michael Leitner, Lars Mattsson, Peter Ekberg, 2014, Journal of the Optical Society of America. A, Optics, image science, and vision.

Model based in-process monitoring with optical coherence tomography

Rong Su, Mikael Hedlind, Lars Mattsson, 2012 .

Performance Evaluation of Micro Milling Installations

Lars Mattsson, Peter Ekberg, Bita Daemi, 2013 .

P-224L: Late-News Poster: Enhancing the Optical Resolution of a Mask Metrology System using a Software Algorithm

Per Liden, Lars Bergman, Peter Ekberg, 2006 .

DEVELOPMENT OF A LOW-COST VISION SYSTEM FOR FINDING CONTOUR AND SURFACE DEFECTS ON CAST IRON ENGINE COMPONENTS Master of Science Thesis in the Master Degree Programme Production Engineering and Management

Anders Berglund, Lars Mattsson, Peter Ekberg, 2014 .

A new 2D-self-calibration method with large freedom and high-precision performance for imaging metrology devices

Peter Ekberg, Lars Mattson, 2015 .

Recent developments in large-area photomasks for display applications

Peter Ekberg, Lars Stiblert, Torbjörn Sandström, 2001 .

Z-correction, a method for achieving ultraprecise self-calibration on large area coordinate measurement machines for photomasks

Lars Mattsson, Peter Ekberg, Lars Stiblert, 2014 .

Metrology : a forgotten added value maker that eliminates cost of poor qualityand supports a sustainable zero defect production

Peter Ekberg, 2012 .

High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface.

Peter Ekberg, Rong Su, Richard Leach, 2017, Optics express.

Past and future challenges from a display mask writer perspective

Peter Ekberg, Axel von Sydow, 2012, Other Conferences.

Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis

Lars Mattsson, Peter Ekberg, Bita Daemi, 2017 .

Self-calibration for the 2D stage based on weighted least squares

Xiaoyu Cai, Guoqing Ding, Xin Chen, 2019, Measurement Science and Technology.

Advanced image analysis verifies geometry performance of micro-milling systems.

Lars Mattsson, Peter Ekberg, Bita Daemi, 2017, Applied optics.

Development of a state-of-the-art nm-measurement system for square meter sized lithography masks

Peter Ekberg, 2012 .

Ultra precision metrology : the key for mask lithography and manufacturing of high definition displays

Peter Ekberg, P. Ekberg, 2011 .

Ultra-precision geometrical measurement technique based on a statistical random phase clock combined with acoustic-optical deflection

Peter Ekberg, Lars Mattsson, Lars Stiblert, 2010 .

A large-area ultra-precision 2D geometrical measurement technique based on statistical random phase detection

Peter Ekberg, Lars Mattsson, Lars Stiblert, 2012 .

Optical coherence tomography for quality assessment of embedded microchannels in alumina ceramic.

Peter Ekberg, Rong Su, Arne Roos, 2012, Optics express.