K. Yoshimi

Vacuum packaging for microsensors by glass-silicon anodic bonding

M. Esashi, S. Shoji, H. Henmi, 1994 .

Large‐scale microfabricated channel plates for high‐throughput, fully automated DNA sequencing

Akira Harada, Yoshiyuki Sakaki, Masahira Hattori, 2008, Electrophoresis.

YAG laser assisted etching for releasing silicon micro structure

K. Yoshimi, Y. Wakabayashi, M. Esashi, 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.