V. Ziebart

Strongly buckled square micromachined membranes

H. Baltes, O. Paul, V. Ziebart, 1999 .

Sacrificial aluminum etching for CMOS microstructures

Oliver Paul, Henry Baltes, M. Hornung, 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

Model predictive control for building automation

R. Füchslin, V. Ziebart, P. Bolt, 2018 .

A Novel Method to Measure Poisson's Ratio of Thin Films

H. Baltes, O. Paul, V. Ziebart, 1997 .

Mechanical properties of thin films from the load deflection of long clamped plates

Oliver Paul, J. Schwizer, Henry Baltes, 1998 .

Stress analysis of a standard CMOS process

Henry Baltes, Oliver Paul, Elko Doering, 1999, Smart Materials, Nano-, and Micro- Smart Systems.