H. Hirano
发表
Muhammad Salman Al Farisi,
Shuji Tanaka,
Muhammad Salman Al Farisi,
2018,
Sensors and Actuators A: Physical.
Shuji Tanaka,
Muhammad Salman Al Farisi,
H. Hirano,
2019,
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS).
Shuji Tanaka,
T. Otto,
H. Hirano,
2016,
Micromachines.
Shuji Tanaka,
H. Hirano,
J. Froemel,
2017
.
Muhammad Salman Al Farisi,
Shuji Tanaka,
H. Hirano,
2017,
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
Muhammad Salman Al Farisi,
Shuji Tanaka,
Muhammad Salman Al Farisi,
2016
.
C. S. Lam,
K. Hashimoto,
J. Kondoh,
2015
.
M. Esashi,
M. Fujita,
T. Somekawa,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
T. Hattori,
H. Hirano,
H. Kuniyasu,
2006,
IEEE Transactions on Semiconductor Manufacturing.
T. Hattori,
H. Hirano,
H. Kuniyasu,
2006,
2006 IEEE International Symposium on Semiconductor Manufacturing.
Shuji Tanaka,
H. Hirano,
Tatsuki Teranishi,
2019,
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
Monolithic integration of BST thin film varactors and Au electroplated thick film inductors above IC
Shuji Tanaka,
R. Pokharel,
H. Hirano,
2015
.
M. Esashi,
Shuji Tanaka,
H. Hirano,
2012,
2012 IEEE International Ultrasonics Symposium.
Shuji Tanaka,
H. Hirano,
J. Froemel,
2018,
Micromachines.
Masanori Muroyama,
Hideki Hirano,
Chenzhong Shao,
2020,
J. Robotics Mechatronics.
Yutaka Nonomura,
Masanori Muroyama,
Shuji Tanaka,
2018
.
Yutaka Nonomura,
Shuji Tanaka,
Masanori Muroyama,
2017,
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
Masayoshi Esashi,
Ken-ya Hashimoto,
Shuji Tanaka,
2015,
IEEE Microwave Magazine.
M. Esashi,
Shuji Tanaka,
A. Teshigahara,
2013,
2013 IEEE International Ultrasonics Symposium (IUS).
Masayoshi Esashi,
Shuji Tanaka,
Ken-ya Hashimoto,
2013
.
Hideki Hirano,
Chenzhong Shao,
Shuji Tanaka,
2020,
IEEE Sensors Journal.
Muhammad Salman Al Farisi,
Shuji Tanaka,
H. Hirano,
2020,
Journal of Microelectromechanical Systems.
Masayoshi Esashi,
Shuji Tanaka,
Hideki Hirano,
2013
.
S. Tanaka,
K. Hikichi,
H. Hirano,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
Hideki Hirano,
Kou Sato,
T. Hattori,
2006
.
M. Esashi,
S. Tanaka,
H. Hirano,
2011,
2011 IEEE International Ultrasonics Symposium.
M. Esashi,
M. Esashi,
K. Hashimoto,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.