M. Villarroya

A platform for monolithic CMOS-MEMS integration on SOI wafers

G. Abadal, J. Esteve, N. Barniol, 2006 .

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

G. Abadal, J. Esteve, A. Boisen, 2006 .

Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

J. Giérak, E. Bourhis, J. Esteve, 2007 .

Sensor based on arrays of sub-micrometer scale resonant silicon cantilevers integrated monolithically with CMOS circuitry

G. Abadal, J. Esteve, N. Barniol, 2005, Conference on Electron Devices, 2005 Spanish.

Cantilever based MEMS for multiple mass sensing

G. Abadal, J. Esteve, N. Barniol, 2005, Research in Microelectronics and Electronics, 2005 PhD.

AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

Jaume Esteve, Anja Boisen, Francesc Pérez-Murano, 2004 .

Zeolite-modified cantilevers for the sensing of nitrotoluene vapors

Isabelle Dufour, Javier Sesé, I. Pellejero, 2009 .