I. Flader
发表
D. Horsley,
T. Kenny,
S. Sonmezoglu,
2017,
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
T. Kenny,
A. Partridge,
M. Hopcroft,
2015,
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Thomas W. Kenny,
Kenneth E. Goodson,
Eldwin J. Ng,
2019,
Journal of Microelectromechanical Systems.
Thomas W. Kenny,
Eldwin J. Ng,
Chae H. Ahn,
2016,
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
T. Kenny,
D. Christensen,
E. Ng,
2016,
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
T. Kenny,
C. Ahn,
I. Flader,
2017,
Journal of Microelectromechanical Systems.
T. Kenny,
A. Seshia,
G. Sobreviela,
2019,
Nature Communications.
T. Kenny,
E. Ng,
C. Ahn,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
T. Kenny,
C. Hierold,
C. Roman,
2018,
2018 IEEE Micro Electro Mechanical Systems (MEMS).
T. Kenny,
A. Shkel,
S. Askari,
2018,
2018 IEEE SENSORS.
O. Sigmund,
T. Kenny,
C. Meinhart,
2017,
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
Joshua E-Y Lee,
T. Kenny,
I. Flader,
2018,
Physical Review Applied.
Thomas W. Kenny,
Azadeh Ansari,
Ian B. Flader,
2018,
Applied Physics Reviews.
Thomas W. Kenny,
David L. Christensen,
Chae Hyuck Ahn,
2017,
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
T. Kenny,
S. Shaw,
M. Dykman,
2016,
Journal of Microelectromechanical Systems.
T. Kenny,
S. Chandorkar,
I. Flader,
2017,
2017 IEEE SENSORS.
Thomas W. Kenny,
Eldwin J. Ng,
Brian J. Lee,
2015,
Journal of Microelectromechanical Systems.
Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators
T. Kenny,
I. Flader,
Yunhan Chen,
2020,
Journal of Microelectromechanical Systems.
T. Kenny,
I. Flader,
Yunhan Chen,
2018
.