V. Nguyen

Thin SQI NEMS accelerometers compatible with In-IC integration

H. Grange, P. Robert, F. Marchi, 2006, 2006 5th IEEE Conference on Sensors.

Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors

B. Reig, N. Kacem, S. Hentz, 2009, Nanotechnology.

Impact of Casimir force on nano accelerometers modeling

L. Duraffourg, P. Robert, V. Nguyen, 2006, 2006 5th IEEE Conference on Sensors.

NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS & NEMS-CMOS integration

T. Ernst, C. Marcoux, P. Ancey, 2008, 2008 IEEE International Conference on Electron Devices and Solid-State Circuits.

M&NEMS: A new approach for ultra-low cost 3D inertial sensor

G. Jourdan, Ph. Robert, L. Duraffourg, 2009, 2009 IEEE Sensors.

Thin SOI NEMS accelerometers compatible with In-IC integration

L. Duraffourg, M. Delaye, S. Deneuville, 2023 .