Y. Bae
发表
Young Cheol Bae,
George G. Barclay,
Seung-Hyun Lee,
2011,
Advanced Lithography.
Sub 30nm Node Contact Hole Patterning Using Immersion Single Exposure with Negative Tone Development
Y. Bae,
R. Bell,
Seikho Kang,
2010
.
Seung-Hyun Lee,
Y. Bae,
R. Bell,
2011
.
P. Trefonas,
Y. Bae,
G. Barclay,
2010
.
James W. Thackeray,
Young Cheol Bae,
George G. Barclay,
2003,
SPIE Advanced Lithography.
H. Koerner,
W. Conley,
C. Ober,
2002
.
Y. Bae,
R. Faust,
1998
.
Y. Bae,
R. Faust,
1998
.
Y. Bae,
Z. Fodor,
R. Faust,
1997
.
Y. Bae,
H. Schlaad,
R. Faust,
1999
.
Dirk Schmaljohann,
Christopher K. Ober,
Alyssandrea H. Hamad,
2000,
Advanced Lithography.
C. Ober,
Y. Bae,
2004
.
Y. Bae,
R. Faust,
1998
.
Seung‐Taek Myung,
Y.‐K. Sun,
Y. Bae,
2005
.
J. Colmenero,
A. Arbe,
D. Richter,
1999
.
Y. Bae,
R. Faust,
D. Li,
1996
.
Y. Bae,
R. Faust,
1997
.
Will Conley,
Paul Zimmerman,
Katsuji Douki,
2002,
SPIE Advanced Lithography.
H. Koerner,
W. Conley,
C. Ober,
2001
.
Junyan Dai,
Will Conley,
Daniel Miller,
2001
.