J. Heo

Comparison of EUV Patterning between PTD and NTD for 2Xnm DRAM

Junghyun Lee, Changil Oh, Jaeheon Kim, 2012 .

Effects of Temperature on the Microscale Adhesion Behavior of Thermoplastic Polymer Film

Kwang-Seop Kim, Kwang-Seop Kim, J. Heo, 2010 .

A simple and novel method for the evaluation of adhesion properties between UV curable resin and stamp in UV-nanoimprint lithography (UV-NIL)

Kwang-Seop Kim, J. Heo, Kyung-Woong Kim, 2012 .

Comparison study for 3x-nm contact hole CD uniformity between EUV lithography and ArF immersion double patterning

Sunyoung Koo, Junggun Heo, Hyunkyung Shim, 2012, Advanced Lithography.