Y. Fukuta

Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware

H. Fujita, H. Toshiyoshi, Y. Fukuta, 2003 .

Fabrication of sharp knife-edged micro probe card combined with shadow mask deposition

Hiroyuki Fujita, Yamato Fukuta, Beomjoon Kim, 2004 .

Autonomous Decentralized Systems Based on Distributed Controlled MEMS Actuator for Micro Conveyance Application

Hiroyuki Fujita, Yoshio Mita, Y.-A. Chapuis, 2004 .

Conveyor for Pneumatic Two-Dimensional Manipulation Realized by Arrayed MEMS and its Control

Hiroyuki Fujita, Satoshi Konishi, Yves-André Chapuis, 2004, J. Robotics Mechatronics.

Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation

H. Fujita, Y. Fukuta, Y. Mita, 2006, Journal of Microelectromechanical Systems.

Pneumatic two-dimensional conveyance system for autonomous distributed MEMS

H. Fujita, Y. Fukuta, Y. Mita, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Improvement of Availability of Level Crossing System by Autonomous Decentralized Technology

Yamato Fukuta, Satoru Kitamura, Manabu Teramoto, 2017, 2017 IEEE 13th International Symposium on Autonomous Decentralized System (ISADS).

Microactuated self-assembling of 3D polysilicon structures with reshaping technology

Eui-Hyeok Yang, Y. Fukuta, Dominique Collard, 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

The Reshaping Technology for Three Dimensional Polysilicon Microstructures

Hiroyuki Fujita, Yamato Fukuta, Terunobu Akiyama, 1997 .

FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application

Hiroyuki Fujita, Lingfei Zhou, Yves-André Chapuis, 2007, IEEE Transactions on Industrial Electronics.