E. Penteker

Silicon on insulator material by Wafer Bonding

C. Hunt, C. Harendt, W. Appel, 1991 .

Silicon fusion bonding and its characterization

C. Harendt, H. Graf, B. Höfflinger, 1992 .

Wafer Bonding and Etchback Techniques for Silicon-on-Isulator Systems

C. Harendt, W. Appel, H. Graf, 1990 .

Silicon‐on‐Insulator Films Obtained by Etchback of Bonded Wafers

C. Harendt, W. Appel, H. Graf, 1989 .

Wafer fusion bonding and its application to silicon-on-insulator fabrication

B. Hofflinger, E. Penteker, W. Appel, 1991 .

Wafer bonding: Investigation and in situ observation of the bond process

Heinz-Gerd Graf, Bernd Höfflinger, Christine Harendt, 1990 .

Silicon direct bonding for sensor applications: Characterization of the bond quality

Heinz-Gerd Graf, Bernd Höfflinger, Christine Harendt, 1990 .