Tatsuhiro Yabune

Etching of Various SiO2

A. Teramoto, H. Kikuyama, M. Miyashita, 2005, Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing.

A Study of the Dissociation State and the SiO2 Etching Reaction for HF Solutions of Extremely Low Concentration

T. Ohmi, N. Miki, H. Kikuyama, 1994 .

Etching Rate and Mechanism of Doped Oxide in Buffered Hydrogen Fluoride Solution

Masayuki Miyashita, Tadahiro Ohmi, Jun Takano, 1992 .

Structural and Electrochemical Characterization of Ethylenediaminated Single-Walled Carbon Nanotubes Prepared from Fluorinated SWCNTs

T. Itoh, T. Hashida, Tatsuhiro Yabune, 2014 .

Improvement of Rinsing Efficiency after Sulfuric Acid Hydrogen Peroxide Mixture (H2SO4/H2O2) by HF Addition

T. Ohmi, Tatsuhiro Yabune, S. Verhaverbeke, 1996 .