H. Koya

Effect of SC1 Process on Silicon Surface Microroughness and Oxide Breakdown Characteristics

K. Akiyama, N. Naito, Motoaki Nagamori, 1995 .

Effect of Solidification Induced Defects in CZ- Silicon Upon Thin Gate Oxide Integrity

H. Koya, H. Suga, H. Abe, 1993 .

The Effect of Hydrogen Annealing on Oxygen Precipitation Behavior and Gate Oxide Integrity in Czochralski Si Wafers

H. Koya, H. Abe, Isamu Suzuki, 1997 .