S. Aoyama

Texture Analysis of Si(100) and Si(111) Surfaces Using Autocovariance Of Afm Images

T. Ohmi, S. Aoyama, 1993 .

Calibration of height in atomic force microscope images with subnanometer scale silicon dioxide steps

T. Ohmi, S. Aoyama, 1992 .

Periodic oxidation for fabricating titanium oxynitride thin films via atomic layer deposition

S. Aoyama, Y. Akasaka, K. Shimomura, 2016 .

Vibrational spectra of magnesia cement, phase 3

S. Aoyama, I. Kanesaka, 2001 .

Control of Material Interactions in Advanced High-k Metal Gate Stacks

G. Leusink, S. Aoyama, C. Wajda, 2006 .

In situ substrate surface cleaning by low‐energy ion bombardment for high quality thin film formation

Tadahiro Ohmi, T. Ohmi, S. Aoyama, 1993 .

Standardized procedure for calibrating height scales in atomic force microscopy on the order of 1 nm

Y. Suzuki, Mineharu Suzuki, T. Osada, 1996 .

Wafer quality specification for future sub-half-micron ULSI devices

T. Ohmi, J. Takano, K. Matsumoto, 1992, 1992 Symposium on VLSI Technology Digest of Technical Papers.