A. Shibuya

Introducing the CTA concept

William H. Lee, R. C. Rannot, Miguel Ángel Martínez, 2013 .

Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

T. Yamamoto, J. Chang, A. Shibuya, 1995, IAS '95. Conference Record of the 1995 IEEE Industry Applications Conference Thirtieth IAS Annual Meeting.

Flow visualization of a particle deposition on silicon wafers in clean rooms

S. Kanazawa, A. Shibuya, T. Ohkubo, 1991, Conference Record of the 1991 IEEE Industry Applications Society Annual Meeting.