M. Esashi

发表

S. Kondo, Shoji Yoshimura, N. Saito, 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

H. Kawai, N. Kawamura, M. Tabata, 2013, 1306.3810.

H. Uetsuka, M. Esashi, H. Uetsuka, 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.