M. Saito

Electron beam direct writing of nanodot patterns on roll mold surfaces by electron beam on-off chopping control

J. Taniguchi, M. Saito, 2014 .

Optimization of resolution by FDTD analysis in aligner lithography

M. Saito, Seiro Murakami, O. Yoshida, 2016 .

Fabrication characteristics of a line-and-space pattern and a dot pattern on a roll mold by using electron-beam lithography

J. Taniguchi, M. Saito, N. Unno, 2016 .

High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks

Masashi Saito, Takeshi Hatsuzawa, Yasuko Yanagida, 2007 .

Parasitic effect-free, high voltage MOS ICs with shielded source structure

T. Suzuki, M. Saito, H. Sakuma, 1982, 1982 International Electron Devices Meeting.