P. Gergaud
发表
Monica Larissa Djomeni Weleguela,
P. Bleuet,
G. Audoit,
2014
.
P. Bleuet,
F. Rieutord,
J. Micha,
2011,
The Review of scientific instruments.
P. Perreau,
D. Mariolle,
Y. Lamy,
2020,
2020 IEEE International Ultrasonics Symposium (IUS).
F. Nemouchi,
D. Mangelinck,
P. Gergaud,
2014
.
Q. Rafhay,
P. Rodriguez,
P. Gergaud,
2021
.
F. Nemouchi,
Q. Rafhay,
C. Jany,
2020,
IEEE Transactions on Electron Devices.
F. Nemouchi,
B. Szelag,
C. Jany,
2020
.
G. Vaughan,
P. Gergaud,
N. Vaxelaire,
2014
.
Dimensional Control of Line Gratings by Small Angle X-Ray Scattering: Shape and Roughness Extraction
P. Gergaud,
M. Besacier,
J. Reche,
2020,
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
H. Renevier,
G. Feuillet,
C. Leclere,
2013
.
F. Nemouchi,
T. Chevolleau,
P. Gergaud,
2017
.
P. Bleuet,
H. Dansas,
J. Barnes,
2013,
Microscopy and Microanalysis.
P. Gergaud,
D. Eichert,
Y. Ménesguen,
2020,
Spectrochimica Acta Part B: Atomic Spectroscopy.
A. Roule,
P. Gergaud,
D. Eichert,
2018,
Spectrochimica Acta Part B: Atomic Spectroscopy.
F. Dimroth,
B. Ghyselen,
L. Benaissa,
2013
.
C. Fenouillet-Béranger,
F. Deprat,
F. Nemouchi,
2018,
Microelectronic Engineering.
O. Thomas,
S. Labat,
P. Gergaud,
2002
.
J. Hartmann,
E. Cassan,
P. Rodriguez,
2021,
Journal of Applied Crystallography.
F. Nemouchi,
P. Rodriguez,
L. Lachal,
2021
.
Patrice Gergaud,
Yoann Blancquaert,
G. Freychet,
2016,
SPIE Advanced Lithography.
F. Fournel,
C. Morales,
J. Widiez,
2015,
2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).
S. Sollier,
J. Widiez,
F. Fournel,
2016
.
F. d'Heurle,
P. Gergaud,
C. Rivero,
2005
.
G. Cailletaud,
H. Jaouen,
O. Thomas,
2006
.
E. Bourhis,
M. Lejeune,
S. Charvet,
2005
.
S. Kordic,
O. Thomas,
P. Gergaud,
2005
.
A. Mazuelas,
O. Thomas,
C. Curtil,
2003
.
O. Thomas,
P. Gergaud,
P. Boivin,
2001
.
Shi-Li Zhang,
A. Mouroux,
O. Thomas,
2000
.
A. Marty,
O. Thomas,
S. Labat,
1999
.
A. Marty,
O. Thomas,
S. Labat,
1999
.
O. Thomas,
A. Böttger,
P. Gergaud,
1999
.
E. .. Mittemeijer,
O. Thomas,
A. Böttger,
1997
.
A. Roule,
S. Maitrejean,
M. Verdier,
2011
.
E. Defay,
T. Schmitz-Kempen,
G. L. Rhun,
2014,
1501.06378.
M. Portail,
B. Damilano,
V. Brändli,
2019,
Journal of Crystal Growth.
D. B. Cunff,
D. Benoit,
A. Claverie,
2020,
Journal of Applied Crystallography.
O. Thomas,
P. Gergaud,
M. Legros,
2003
.
P. Batude,
B. Sklénard,
B. Mathieu,
2016
.
P. Albouy,
C. Licitra,
V. Rouessac,
2012
.
P. Albouy,
M. Verdier,
C. Licitra,
2011
.
F. Nemouchi,
A. Royer,
D. Mariolle,
2022,
2022 IEEE International Interconnect Technology Conference (IITC).
G. Ghibaudo,
C. Leroux,
Pushpendra Kumar,
2019,
MRS Advances.
J. Faist,
J. Hartmann,
H. Dansas,
2019,
ACS Photonics.
J. Hartmann,
E. Cassan,
V. Delaye,
2020,
Journal of applied crystallography.
D. Rouchon,
P. Gergaud,
A. Durand,
2017
.
D. Benoit,
A. Claverie,
M. Hytch,
2015,
2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO).
X. Federspiel,
O. Thomas,
P. Gergaud,
2005,
2005 IEEE International Integrated Reliability Workshop.
X. Federspiel,
O. Thomas,
P. Gergaud,
2005,
Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005..
B. Previtali,
F. Nemouchi,
P. Rodriguez,
2017
.
O. Thomas,
P. Gergaud,
O. Chaix-Pluchery,
2003
.
O. Gourhant,
F. Bertin,
N. Jaouen,
2019,
Semiconductor Science and Technology.
Y. Campidelli,
O. Gourhant,
F. Bertin,
2017,
2017 IEEE 12th Nanotechnology Materials and Devices Conference (NMDC).
P. Gergaud,
A. Jonchère,
P. Ballet,
2012,
Journal of Electronic Materials.
P. Gergaud,
F. Gemain,
I. Robin,
2010
.
O. Thomas,
P. Gergaud,
M. Putero,
2000
.
F. Nemouchi,
Shi-Li Zhang,
T. Kubart,
2021,
2104.00694.
O. Thomas,
S. Labat,
P. Gergaud,
2006
.
J. Lebrun,
P. Gergaud,
K. Inal,
1995
.
S. Kerdilès,
P. Gergaud,
E. Scheid,
2020,
Applied Surface Science.
O. Thomas,
P. Gergaud,
M. Gailhanou,
2005
.
E. Arzt,
O. Thomas,
G. Dehm,
2005
.
Q. Rafhay,
C. Jany,
P. Gergaud,
2023,
Materials Science in Semiconductor Processing.
C. Jany,
P. Rodriguez,
P. Gergaud,
2022,
IEEE Journal of the Electron Devices Society.
F. Nemouchi,
B. Szelag,
C. Jany,
2018,
2018 IEEE International Interconnect Technology Conference (IITC).
O. Thomas,
G. Gładyszewski,
S. Labat,
2002
.
P. Haumesser,
C. Santini,
P. Gergaud,
2014,
Nanoscale.
P. Jouneau,
G. Feuillet,
P. Gergaud,
2011,
1106.4383.
F. Vacandio,
O. Thomas,
P. Gergaud,
2000
.
Influence of substrate-induced thermal stress on the superconducting properties of V 3 Si thin films
F. Nemouchi,
T. Kubart,
P. Gergaud,
2020,
2010.07312.
O. Thomas,
S. Labat,
P. Gergaud,
1998
.
O. Thomas,
P. Gergaud,
B. Chenevier,
2003
.
J. Hartmann,
D. Mariolle,
V. Loup,
2022,
Microelectronic Engineering.
A. Deneuville,
O. Thomas,
J. Birch,
2000
.
P. Rodriguez,
S. Messaoudene,
P. Gergaud,
2023,
Materials Science in Semiconductor Processing.
O. Thomas,
G. Gładyszewski,
S. Labat,
1998
.
A. Marty,
O. Thomas,
S. Labat,
1997
.
P. Gergaud,
J. Lebrun,
M. Zaouali,
1991
.
Thomas Signamarcheix,
Patrice Gergaud,
Vincent Delaye,
2014
.
J. Hartmann,
E. Cassan,
P. Rodriguez,
2022,
Microelectronic Engineering.
O. Thomas,
R. Madar,
P. Gergaud,
2003
.
J. Lebrun,
P. Gergaud,
J. Guedou,
1997
.
J. Lebrun,
P. Gergaud,
K. Ostolaza,
1997
.
G. Feuillet,
P. Gergaud,
F. Baudin,
2011
.
J. Micha,
O. Robach,
O. Ulrich,
2011
.
C. Yildirim,
R. Pesci,
P. Gergaud,
2021,
Acta Materialia.
J. Hartmann,
V. Reboud,
P. Gergaud,
2023,
Microelectronic Engineering.
J. Hartmann,
E. Cassan,
P. Rodriguez,
2020
.
J. Hartmann,
F. Nemouchi,
V. Loup,
2018,
Journal of Applied Physics.
J. Hartmann,
E. Cassan,
V. Loup,
2018,
2018 IEEE International Interconnect Technology Conference (IITC).
Patrice Gergaud,
Amal Chabli,
Vincent Jousseaume,
2009,
Nature nanotechnology.
O. Ersen,
O. Thomas,
P. Gergaud,
2003
.
Laurence Lemelle,
Pierre Bleuet,
Rémi Tucoulou,
2010
.
F. Nemouchi,
N. Boudet,
S. Zhiou,
2016
.
O. Thomas,
P. Gergaud,
B. Chenevier,
2003
.
A. Mazuelas,
G. Gonzalez,
P. Gergaud,
2006
.
P. Gergaud,
K. Inal,
M. Saadaoui,
2014
.
A. Michon,
A. Kolobov,
H. Okuno,
2019,
Nanotechnology.
D. Chateigner,
M. Morales,
G. Pepponi,
2015
.
Y. Bogumilowicz,
F. Ducroquet,
Mickael Martin,
2018
.
P. Gergaud,
N. Vaxelaire,
E. Zatterin,
2021,
Materials.
E. Defay,
G. L. Rhun,
I. Gueye,
2016
.
Christophe Navarro,
Raluca Tiron,
Xavier Chevalier,
2014
.
A. Marty,
O. Thomas,
S. Labat,
2000
.
Shay Reboh,
Pierre Bleuet,
Patrice Gergaud,
2016,
Microelectronics and reliability.
P. Bleuet,
D. Ferreira Sánchez,
J. Laurencin,
2015,
Journal of applied crystallography.
J. Hartmann,
P. Rodriguez,
V. Reboud,
2018,
Journal of Applied Crystallography.
F. Nemouchi,
D. Mangelinck,
P. Rodriguez,
2018,
Microelectronic Engineering.
Patrice Gergaud,
Herve Jaouen,
M. Gailhanou,
2005
.
H. Jaouen,
O. Thomas,
P. Gergaud,
2004
.
H. Jaouen,
O. Thomas,
P. Gergaud,
2004
.
F. Nemouchi,
N. Boudet,
S. Zhiou,
2015,
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).
F. Nemouchi,
S. Zhiou,
P. Rodriguez,
2016,
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC).
Ph Rodriguez,
F. Nemouchi,
P. Gergaud,
2015,
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).
F. Nemouchi,
P. Rodriguez,
E. Ghegin,
2020
.
Marc Legros,
Patrice Gergaud,
Eduard Arzt,
2003
.
M. Charles,
N. Rochat,
P. Gergaud,
2020,
physica status solidi (b).
M. Charles,
J. Hartmann,
M. Argoud,
2018,
Nanotechnology.
Guillaume Freychet,
Raluca Tiron,
Xavier Chevalier,
2016
.
A. Dias,
J. Lebrun,
M. Marqués,
2000
.
J. Hartmann,
E. Cassan,
P. Rodriguez,
2021
.
In situ study of strain evolution during thin film Ti/AL(Si,Cu) reaction using synchrotron radiation
A. Mazuelas,
O. Thomas,
P. Gergaud,
2002
.
M. Fernández-Regúlez,
R. Tiron,
P. Gergaud,
2020
.
Z. Zalevsky,
Z. Kotler,
P. Gergaud,
2019,
Journal of Physics D: Applied Physics.
G. Feuillet,
V. Consonni,
P. Gergaud,
2008
.
G. Feuillet,
V. Consonni,
P. Gergaud,
2008
.
C. Goldberg,
N. Cherault,
P. Gergaud,
2005
.
A. Ronda,
J. Derrien,
O. Thomas,
2000
.
M. Besacier,
Jérôme Reche,
Patrice Gergaud,
2019,
Advanced Lithography.
M. Besacier,
Jérôme Reche,
Patrice Gergaud,
2018,
European Mask and Lithography Conference.
O. Thomas,
P. Gergaud,
A. Loubens,
2004
.
O. Thomas,
P. Gergaud,
F. Bocquet,
2003
.
M. Charles,
J. Zúñiga-Pérez,
C. Yildirim,
2023,
Journal of applied crystallography.
F. Lorut,
J. Charbonnier,
P. Bleuet,
2014,
Optics & Photonics - Optical Engineering + Applications.
J. Lebrun,
P. Gergaud,
V. Ji,
1994
.
Peter Cloetens,
Pierre Bleuet,
Rémi Tucoulou,
2009,
The Review of scientific instruments.
Mickael Martin,
T. Baron,
N. Rochat,
2018
.
V. Delaye,
N. Possémé,
P. Gergaud,
2021
.
S. Leake,
I. Gueye,
P. Gergaud,
2023,
Journal of Applied Physics.
J. Hartmann,
S. Kerdilès,
V. Delaye,
2019,
ECS Journal of Solid State Science and Technology.
Y. Bogumilowicz,
Mickael Martin,
T. Baron,
2018
.
F. Nemouchi,
A. Royer,
P. Gergaud,
2023,
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM).
A. Kaminski-Cachopo,
V. Consonni,
J. Michallon,
2014,
Nanoscale Research Letters.
E. Defay,
G. Vaughan,
A. Bernasconi,
2016
.
W. Schwarzenbach,
J. Widiez,
D. Mariolle,
2023,
Materials Science Forum.