D. Westberg

Surface micromachining by sacrificial aluminium etching

H. Baltes, O. Paul, G. Andersson, 1996 .

Sacrificial aluminum etching for CMOS microstructures

Oliver Paul, Henry Baltes, M. Hornung, 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

A novel CMOS-compatible inkjet head

G. Andersson, D. Westberg, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

A CMOS-compatible fluid density sensor

H. Baltes, O. Paul, G. Andersson, 1997 .