Lars Stiblert

A new general approach for solving the self-calibration problem on large area 2D ultra-precision coordinate measurement machines

Lars Mattsson, Peter Ekberg, Lars Stiblert, 2014 .

P-224L: Late-News Poster: Enhancing the Optical Resolution of a Mask Metrology System using a Software Algorithm

Per Liden, Lars Bergman, Peter Ekberg, 2006 .

Integrating real-time CD corrections into a laser pattern generator

Lars Stiblert, Lars Ivansen, Christian K. Kalus, 2002, Photomask Japan.

Recent developments in large-area photomasks for display applications

Peter Ekberg, Lars Stiblert, Torbjörn Sandström, 2001 .

Z-correction, a method for achieving ultraprecise self-calibration on large area coordinate measurement machines for photomasks

Lars Mattsson, Peter Ekberg, Lars Stiblert, 2014 .