A. Tatzel

Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applications

H. Hillmer, N. Worapattrakul, A. Tatzel, 2020 .

Micromirror Arrays for Smart Personal Environments

Hartmut Hillmer, I. Bergmair, V. Viereck, 2015 .

Surface roughness analysis of SiO2 for PECVD, PVD and IBD on different substrates

Hartmut Hillmer, Muhammad Rizwan Amirzada, V. Viereck, 2016, Applied Nanoscience.

Optical MEMS-based micromirror arrays for active light steering in smart windows

Hartmut Hillmer, Carsten Woidt, Basim Al-Qargholi, 2018, Japanese Journal of Applied Physics.