H. Seidel

发表

Displacement amplification of piezoelectric microactuators with a micromachined leverage unit

K. Bauer, U. Schmid, C. Bolzmacher, 2010 .

RF-MEMS Switch and Phase Shifter Optimized for W-Band

U. Prechtel, A. Stehle, B. Schoenlinner, 2008, 2008 38th European Microwave Conference.

Electrical Performance of Alumina Thin Films for High-Temperature Pressure Cells With a Metallic Body

U. Schmid, A. Friedberger, H. Seidel, 2010, IEEE Sensors Journal.

Bistable Microvalve for Biomedical Usage

U. Schmid, S. Büttgenbach, H. Seidel, 2011 .

Effect of high temperature annealing on the electrical performance of titanium/platinum thin films

Ulrich Schmid, U. Schmid, H. Seidel, 2008 .

Influence of thermal annealing on the resistivity of titanium/platinum thin films

U. Schmid, H. Seidel, 2006 .

Glass Cap Packaged High Isolating Ka-Band RF-MEMS Switch

U. Schmid, G. Georgiev, V. Ziegler, 2009 .

Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates

U. Schmid, A. Ababneh, A. Bittner, 2010 .

Investigation on the Porosification Behaviour of Fired LTCC Substrates

U. Schmid, A. Bittner, A. Roosen, 2009 .

Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures

A. Ababneh, H. Seidel, A. Dagamseh, 2021, Microsystem Technologies.

Investigation of the interaction between electrical discharges and low resistivity silicon substrates

U. Schmid, F. Mücklich, H. Seidel, 2008 .

Design and characterization of AlN-based in-plane microplate resonators

Ulrich Schmid, M. Kucera, Tomas Manzaneque, 2013 .

Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates

H. Seidel, U. Schmid, A. Bittner, 2012 .

The impact of substrate properties and thermal annealing on tantalum nitride thin films

U. Schmid, A. Roosen, H. Seidel, 2012 .

Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering

U. Schmid, A. Roosen, H. Seidel, 2010 .

Effect of substrate properties and thermal annealing on the resistivity of molybdenum thin films

Ulrich Schmid, Helmut Seidel, U. Schmid, 2005 .

Characterization and simulation of the first extensional mode of rectangular micro-plates in liquid media

H. Seidel, T. Manzaneque, J. Sánchez-Rojas, 2012 .

Robust superelastic, metallic amplification unit for piezoelectric microactuators

Hans-Peter Seidel, Ulrich Schmid, Christian Bolzmacher, 2009, Microtechnologies.

Modal optimization and filtering in piezoelectric microplate resonators

Ulrich Schmid, José Carlos Bellido, Alberto Donoso, 2010 .

Morphological and Electrical Properties of Silver Thin Films Sputter Deposited on LTCC Substrates

U. Schmid, A. Bittner, H. Seidel, 2008 .

A robust pressure sensor for harsh environmental applications

Ulrich Schmid, Helmut Seidel, Alois Friedberger, 2012 .

Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal waves

A. Ababneh, A. Ababneh, H. Seidel, 2020 .

High temperature measurement set-up for the electro-mechanical characterization of robust thin film systems

Ulrich Schmid, Helmut Seidel, Alois Friedberger, 2013 .

Micromachined pressure sensor based on sapphire for high temperature applications

U. Schmid, A. Friedberger, H. Seidel, 2010 .

Polyatomic degrees of freedom and their temporal evolution extracted from the damping of micro-oscillators

A. Ababneh, H. Seidel, P. Schwarz, 2019, Sensors and Actuators A: Physical.

Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2011 .

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2012 .