Xinxin Li

Maskless anisotropic etching-a novel micromachining technology for multilevel microstructures

M. Bao, Xinxin Li, S. Shen, 1997, International Conference on Solid-State Sensors, Actuators and Microsystems.

A micromachined piezoresistive angular rate sensor with a composite beam structure

Minhang Bao, Shaoqun Shen, Deren Lu, 1999 .

Study on convex-corner undercutting formed by masked-maskless etching in aqueous KOH

J. Miao, R. Lin, M. Bao, 2000 .

Study on linearization of silicon capacitive pressure sensors

Minhang Bao, Shaoqun Shen, M. Bao, 1997 .

Resonance enhancement of micromachined resonators with strong mechanical-coupling between two degrees of freedom

M. Esashi, T. Ono, R. Lin, 2003 .

Performance-enhanced micro-machined resonant systems with two-degrees-of-freedom resonators

Xinxin Li, Rongming Lin, Kok Wah Leow, 2000 .

Which etchant used and whether an etching mask exists: how they make differences on convex-corner undercutting configuration and compensation criteria

Xinxin Li, Rongming Lin, Minhang Bao, 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Maskless etching of three-dimensional silicon structures in KOH

Minhang Bao, Shaoqun Shen, M. Bao, 1996 .