M. Hornung

Integrated micromachined decoupled CMOS chip on chip

H. Baltes, T. Muller, M. Schneider, 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

Ultrasound barrier microsystem for object detection based on micromachined transducer elements

Oliver Brand, Henry Baltes, C. Hafner, 1997 .

Sacrificial aluminum etching for CMOS microstructures

Oliver Paul, Henry Baltes, M. Hornung, 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

Micromachined acoustic Fabry-Perot system for distance measurement

O. Brand, M. Hornung, C. Kuratli, 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

CMOS resonant sensors

Oliver Brand, Henry Baltes, M. Hornung, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.