Y. X. Li

Reactive ion etching (RIE) techniques for micromachining applications

M. R. Wolffenbuttel, R. Wolffenbuttel, P. Sarro, 1994 .

Plasma planarization for sensor applications

Reinoud F. Wolffenbuttel, Patrick J. French, R. Wolffenbuttel, 1995 .

Pulsed Laser Deposition of Highly Crystalline Gan Films on Sapphire

Michael G. Spencer, Xiao Tang, Agis A. Iliadis, 1997 .

Process design for plasma etching of polysilicon/silicon nitride/polysilicon sandwich structures for sensor applications

Pasqualina M. Sarro, Reinoud F. Wolffenbuttel, P. J. French, 1993 .