A. Yamaguchi
发表
C. Koay,
S. Halle,
M. Colburn,
2012,
2012 SEMI Advanced Semiconductor Manufacturing Conference.
S. Arai,
A. Yamaguchi,
T. Ougizawa,
2019,
Optics & Laser Technology.
S. Arai,
A. Yamaguchi,
T. Ougizawa,
2019,
Optics & Laser Technology.
I. Nishiyama,
A. Yamaguchi,
J. Onodera,
2007
.
I. Nishiyama,
A. Yamaguchi,
J. Onodera,
2006
.
I. Nishiyama,
A. Yamaguchi,
J. Onodera,
2006
.
H. Fukuda,
A. Yamaguchi,
J. Onodera,
2006
.
E. Takeda,
A. Yamaguchi,
H. Oizumi,
1994
.
K. Takeda,
A. Yamaguchi,
J. Yamamoto,
2008
.
T. Morisawa,
N. Matsuzawa,
S. Mori,
1998
.
Atsuko Yamaguchi,
Hiroki Kawada,
Takashi Iizumi,
2004,
SPIE Advanced Lithography.
S. Arai,
A. Yamaguchi,
T. Ougizawa,
2018
.
Scott Halle,
Atsuko Yamaguchi,
Shunsuke Koshihara,
2016
.
T. Tada,
A. Yamaguchi,
T. Ninomiya,
1993
.
Self‐Developing Characteristics of Si Containing Polymers and Their Application to X‐Ray Lithography
E. Takeda,
A. Yamaguchi,
H. Oizumi,
1996
.
Atsuko Yamaguchi,
Hiroki Kawada,
Takashi Iizumi,
2003,
SPIE Advanced Lithography.
Atsuko Yamaguchi,
Jiro Yamamoto,
A. Yamaguchi,
2008,
SPIE Advanced Lithography.
Takeyoshi Ohashi,
Atsuko Yamaguchi,
Masami Ikota,
2018,
Journal of Micro/Nanolithography, MEMS, and MOEMS.