Alfred Grill

发表

Bonding, Interfacial Effects And Adhesion In DLC.

Alfred Grill, Bernard S. Meyerson, Vishnubhai Vitthalbhai Patel, 1989, Optics & Photonics.

High-speed lateral PIN photodiodes in silicon technologies

Alfred Grill, Jeremy D. Schaub, Steven J. Koester, 2004, SPIE OPTO.

Hardmask technology for sub-100 nm lithographic imaging

Scott Halle, Timothy A. Brunner, Marie Angelopoulos, 2003, SPIE Advanced Lithography.

Induced e-beam charge impact on spatial orientation of gate-all-around silicon wires device fabricated on boron nitride substrate

Shimon Levi, Ofer Adan, Alfred Grill, 2015, Advanced Lithography.

Plasma-deposited diamondlike carbon and related materials

Alfred Grill, A. Grill, 1999, IBM J. Res. Dev..

Ultrathin (8-14 nm) Conformal SiN for sub-20 nm Copper/Low-k Interconnects

Daniel C. Edelstein, Alfred Grill, Jay Burnham, 2014 .

Low-k/copper integration scheme suitable for ULSI manufacturing from 90nm to 45nm nodes

Fen Chen, Daniel C. Edelstein, Ian D. Melville, 2005, SPIE Optics East.

The Evaluation of Wrinkles in Textile Fabrics

Alfred Grill, Miriam Shiloh, A. Grill, 1966 .

Tunable antireflective coatings with built-in hard mask properties facilitating thin-resist processing

Scott Halle, Marie Angelopoulos, Alfred Grill, 2001, SPIE Advanced Lithography.

LOW DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION FROM TETRAMETHYLSILANE

Alfred Grill, Vishnubhai Vitthalbhai Patel, A. Grill, 1999 .

Cold Plasma in Materials Fabrication: From Fundamentals to Applications

Alfred Grill, A. Grill, 1994 .

Epitaxial graphene nanoribbon array fabrication using BCP-assisted nanolithography.

Guanxiong Liu, Phaedon Avouris, Yu-Ming Lin, 2012, ACS nano.

Diamond-like carbon coatings as biocompatible materials—an overview

Alfred Grill, A. Grill, 2003 .

Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition

Alfred Grill, V. V. Patel, A. Grill, 2001 .

Structural characterization of porous low-k thin films prepared by different techniques using x-ray porosimetry

Wen-li Wu, Eric K. Lin, Christopher L. Soles, 2004 .

Electrical characterization of wafer-scale epitaxial graphene and its RF applications

Keith A. Jenkins, Phaedon Avouris, Yu-Ming Lin, 2011, 2011 IEEE MTT-S International Microwave Symposium.

Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene

Bernard S. Meyerson, Alfred Grill, Vishnubhai Vitthalbhai Patel, 1990 .

Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

Alfred Grill, Son Van Nguyen, Deepika Priyadarshini, 2014 .

Germanium-on-insulator photodetectors

Alfred Grill, Jeremy D. Schaub, Steven J. Koester, 2005 .

Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors

Keith A. Jenkins, Phaedon Avouris, Yu-Ming Lin, 2010 .