Lothar Pfitzner
发表
Heiner Ryssel,
N. Benesch,
Claus Schneider,
1999,
Other Conferences.
Lothar Frey,
Lothar Pfitzner,
Martin Schellenberger,
2010,
Photonics Europe.
Heiner Ryssel,
Claus Schneider,
Lothar Pfitzner,
1997,
1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023).
Heiner Ryssel,
Lothar Pfitzner,
Patrick Verdonck,
2008
.
Cian O'Murchu,
Ludger Krahn,
Heiner Ryssel,
2006
.
Rudolf Berger,
Heiner Ryssel,
Claus Schneider,
1996,
Advanced Lithography.
Heiner Ryssel,
N. Benesch,
Claus Schneider,
2002
.
Stefan Sommer,
Heiner Ryssel,
Lothar Pfitzner,
2000,
SPIE Advanced Lithography.
C. Claeys,
Heiner Ryssel,
A. Danel,
2006
.
Claus Schneider,
Lothar Pfitzner,
Matthias Slodowski,
2004,
SPIE Advanced Lithography.
Heiner Ryssel,
Claus Schneider,
Lothar Pfitzner,
2002,
13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259).
Lothar Pfitzner,
I. Lazareva,
Andreas Nutsch,
2009,
Optical Metrology.
Heiner Ryssel,
Claus Schneider,
Lothar Pfitzner,
2001,
Microelectronic and MEMS Technologies.
Heiner Ryssel,
N. Benesch,
Claus Schneider,
1999,
Other Conferences.
Heiner Ryssel,
Claus Schneider,
Lothar Pfitzner,
1997,
1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023).
Heiner Ryssel,
N. Benesch,
Claus Schneider,
2001,
2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).
Lothar Frey,
Lothar Pfitzner,
Martin Schellenberger,
2009
.
Heiner Ryssel,
Claus Schneider,
Lothar Pfitzner,
1999
.
M. Schottler,
Heiner Ryssel,
Lothar Pfitzner,
2001,
Microelectronic and MEMS Technologies.
Lothar Pfitzner,
Eckhard Müller,
Markus Pfeffer,
2002
.
Norbert Benesch,
Lothar Pfitzner,
Hans-Martin Dudenhausen,
2001
.
Heiner Ryssel,
Lothar Pfitzner,
J. Frickinger,
2000
.